Syllabus for Micro- and Nanotechnology I

Mikro- och nanoteknik I


  • 5 credits
  • Course code: 1TE015
  • Education cycle: Second cycle
  • Main field(s) of study and in-depth level: Technology A1N, Quantum Technology A1N, Materials Engineering A1N
  • Grading system: Fail (U), Pass (3), Pass with credit (4), Pass with distinction (5)
  • Established: 2010-03-16
  • Established by:
  • Revised: 2023-02-03
  • Revised by: The Faculty Board of Science and Technology
  • Applies from: Autumn 2023
  • Entry requirements:

    120 credits in science/engineering, including Semiconductor electronics, Solid state physics I or Solid state physics F, Materials chemistry or Introduction to materials engineering. Proficiency in English equivalent to the Swedish upper secondary course English 6.

  • Responsible department: Department of Materials Science and Engineering

Learning outcomes

The aim of the course is to introduce micro- and nanotechnology from applications and construction.

On completion of the course the student shall be able to:

  • define basic terms in micro- and nanotechnology, actuator technology and sensor technology;
  • analyse how different physical phenomena scale when dimensions shrink and how this affects micro- and nanosystems;
  • analyse how different physical phenomenon can be used to achieve different sensor and actuator functions;
  • argument for material choices in micro- and nanotechnology based on functional, process technological, and economical factors;
  • explain approaches and account for possibilities and limitations for the basic manufacturing methods used in micro- and nanotechnology;
  • explain and argue for the choice of different micro and miniature actuators in different applications;
  • explain and argue for the choice of different microsensors in different applications.


Scaling of phenomena and properties when dimensions decrease. Materials properties and function, especially on silicon. Basic manufacturing methods as lithography, deposition, wet and dry etching, and bonding, and important factors as selectivity, etching speed and yield. Properties and applications of microsensors and microactuators. Industrial and economic aspects.


Lectures, laborations, seminars and company visits.


Written exam (3 credits). Company visits, approved laboratory work and assignments (2 credits).


If there are special reasons for doing so, an examiner may make an exception from the method of assessment indicated and allow a student to be assessed by another method. An example of special reasons might be a certificate regarding special pedagogical support from the disability coordinator of the university.

Reading list

Reading list

Applies from: Autumn 2023

Some titles may be available electronically through the University library.

  • Franssila, Sami. Introduction to Microfabrication [Elektronisk resurs]

    2nd ed.: Hoboken: John Wiley & Sons, Ltd., 2010

    Find in the library


  • Edwin Dertien, ; Paul P.L. Regtien, "Sensors for Mechatronics, 2nd Edition" [Elektronisk resurs]


    Find in the library


Last modified: 2022-04-26