Entry requirements

One year of studies within the Master programme in Applied Biotechnology.

Content

Materials science on a microlevel concerning especially silicon, but also materials manufactured in similar ways, such as quartz, III-V semiconductors and SiC (siliconcarbide). Basic techniques such as lithography, deposition techniques, isotropic and anisotropic wet etching, dopant selective etching, dry etching, bonding techniques and surface micromachining. Measurement principles. Applications on sensors, actuators and integrated microsystems.

Laboratory work: Fabricaton of micromechanical component in silicon (2 days).

Instruction

Lectures, laboratory work and field trips to companies.

Assessment

Written and/or oral examination at the end of the course. Passed laboratory course is also required.

If there are special reasons for doing so, an examiner may make an exception from the method of assessment indicated and allow a student to be assessed by another method. An example of special reasons might be a certificate regarding special pedagogical support from the disability coordinator of the university.