Ylva Bäcklund

Artefacts in continuous ECG recordings: provoking and preventing manoeuvres

Lönnblad, Jens; Nilsson, Göran; Folke, Mia; Hök, Bertil et al.

Ingår i Scandinavian Cardiovascular Journal, s. 167-171, 2005

• DOI för Artefacts in continuous ECG recordings: provoking and preventing manoeuvres

A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis

Jönsson, Mats; Aldaeus, Fredrik; Johansson, LarsErik; Lindberg, Ulf et al.

Ingår i Proceedings of the fifth Micro Structure Workshop, s. 65-69, 2004

A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis

Jönsson, Mats; Aldaeus, F; Johansson, L E; Lindberg, Ulf et al.

Ingår i Micro Structure Workshop, 29-31 March, Ystad, Sweden, 2004

High gain micromachined slot-coupled patch-antenna for 60 GHz WLAN application

Öjefors, Erik; Lindblom, J; Rydberg, Anders; Kurup, Danesh G et al.

Ingår i 8th COST 260 Meeting on Smart Antenna Computer Aided Design & Technology, Université de Rennes, France, 2001

Silicon fusion bond interfaces resilient to wet anisotropic etchants

Köhler, Johan; Strandman, Carola; Vallin, Örjan; Hedlund, Christer et al.

Ingår i Journal of Micromechanics and Microengineering, s. 359-363, 2001

Artefacts in continuous ECG recordings: provoking and preventing manoeuvres

Lönnblad, Jens; Nilsson, Göran; Folke, Mia; Hök, Bertil et al.

Ingår i Scandinavian Cardiovascular Journal, s. 167-171, 2005

• DOI för Artefacts in continuous ECG recordings: provoking and preventing manoeuvres

A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis

Jönsson, Mats; Aldaeus, Fredrik; Johansson, LarsErik; Lindberg, Ulf et al.

Ingår i Proceedings of the fifth Micro Structure Workshop, s. 65-69, 2004

Silicon fusion bond interfaces resilient to wet anisotropic etchants

Köhler, Johan; Strandman, Carola; Vallin, Örjan; Hedlund, Christer et al.

Ingår i Journal of Micromechanics and Microengineering, s. 359-363, 2001

High-temperature piezoresistive gauge fabricated on commercially available silicon-on-insulator wafers

Vallin, Örjan; Bäcklund, Ylva

Ingår i J Micromech Microeng, s. 196-199, 2000

Quartz-to-quartz direct bonding

Rangsten, Pelle; Vallin, Örjan; Hermansson, Karin; Bäcklund, Ylva

Ingår i Journal of the Electrochemical Society, s. 1104-1105, 1999

• DOI för Quartz-to-quartz direct bonding

Low cost micromachined mirrors for display systems

Vangbo, Mattias; Karlsson, S; Backlund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 85-88, 1999

• DOI för Low cost micromachined mirrors for display systems

Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection Using Redox Cycling

Richard, Åse; Klett, Oliver; Strandman, Carola; Bäcklund, Ylva et al.

Ingår i MEMS-Proceedings of the ASME International Mechanical Engineering, Congress and Exposition, s. 511-516, 1999

Decreasing the optical path length in an optoelectronic module using silicon micromachining

Richard, Åse; Rangsten, Pelle; Strandman, Carola; Backlund, Ylva

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 127-129, 1999

Passive and fixed alignment of devices using flexible silicon elements formed by selective etching

Strandman, Carola; Backlund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 39-44, 1998

• DOI för Passive and fixed alignment of devices using flexible silicon elements formed by selective etching

A lateral symmetrically bistable buckled beam

Vangbo, Mattias; Backlund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 29-32, 1998

• DOI för A lateral symmetrically bistable buckled beam

Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation

Rangsten, Pelle; Hedlund, Christer; Katardjiev, Ilia; Backlund, Ylva

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 1-6, 1998

Bulk silicon holding structures for mounting of optical fibres in v-grooves

Strandman, Carola; Bäcklund, Ylva

Ingår i J Microelectromech Syst, s. 35-40, 1997

Micromechanics in optical microsystems - with focus on telecom systems

Bäcklund, Ylva

Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 93-98, 1997

Terracing of (100) Si with one mask and one etching step using misaligned V-grooves

Vangbo, Mattias; Bäcklund, Ylva

Ingår i Journal of Micromechanics and Microengineering, s. 39-42, 1996

• DOI för Terracing of (100) Si with one mask and one etching step using misaligned V-grooves

A Method for the Determination of the Angular Dependence during Dry Etching

Hedlund, Christer; Strandman, Carola; Katardjiev, Ilia; Bäcklund, Ylva et al.

Ingår i Journal of Vacuum Science & Technology B, s. 3239, 1996

• DOI för A Method for the Determination of the Angular Dependence during Dry Etching

Fabrication of 45 Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon

Strandman, Carola; Rosengren, Lars; Elderstig, H G A; Bäcklund, Ylva

Ingår i Journal of microelectromechanical systems, s. 213-219, 1995

• DOI för Fabrication of 45 Mirrors Together with Well-Defined V-Grooves Using Wet Anisotropic Etching of Silicon

The effects of HF-cleaning prior to silicon wafer bonding

Ljungberg, Karin; Bäcklund, Ylva; Söderbärg, Anders; Bergh, M et al.

Ingår i Journal of the Electrochemical Society, s. 1297-1303, 1995

• DOI för The effects of HF-cleaning prior to silicon wafer bonding

A Study of Biological Particles in Bio-MEMS Devices using Dielectrophoresis

Jönsson, Mats; Aldaeus, F; Johansson, L E; Lindberg, Ulf et al.

Ingår i Micro Structure Workshop, 29-31 March, Ystad, Sweden, 2004

High gain micromachined slot-coupled patch-antenna for 60 GHz WLAN application

Öjefors, Erik; Lindblom, J; Rydberg, Anders; Kurup, Danesh G et al.

Ingår i 8th COST 260 Meeting on Smart Antenna Computer Aided Design & Technology, Université de Rennes, France, 2001

Micromachining in Silicon for Passive Alignment of Optical Fibres

Bäcklund, Ylva

Ingår i Micro-Opto-Electro-Mechanical Systems, 22-23 May, Glasgow, Scotland, United Kingdom, Proc. of SPIE Vol. 4075, s. 118, 2000

Anodic bonding of materials with large difference in thermal expansion

Hagman, Björn; Richard, Åse; Bäcklund, Ylva; Hedlund, Christer

Ingår i MME'00 (Micro Mechanics Europe), October 1-3, Uppsala, Sweden, 2000

Silicon fusion bond interfaces resilient to wet anisotropic etchants

Köhler, Johan; Strandman, Carola; Vallin, Örjan; Hedlund, Christer et al.

Ingår i Micromechanics Europe 2000, Uppsala, s. 142-145, 2000

High gain micromachined slot-coupled patch-antenna for 60 GHz WLAN application

Öjefors, E; Lindblom, J; Rydberg, A; Kurup, DG et al.

Ingår i 8th COST 260 Meeting on Smart Antenna Computer Aided Design & Technology, Université de Rennes, France, 2000

Micro sculpturing - Somewhat new materials and micromachining methods to meet new applications

Bäcklund, Ylva; Hjort, Klas; Johansson, Stefan; Stenmark, Lars

Ingår i Eurosensors -99, 1999

Low Temperature Anodic Bonding of a Sub-Micrometer Fabry-Perot Cavity

Richard, Åse; Sundin, Kjell; Bäcklund, Ylva

Ingår i Proc Fifth Int Symp on Semiconductor Wafer Bonding: Science, Technology and Applications, Honolulu, 17-22 Oct 1999, pp 1015, s. 1015, 1999

Field emitting structures intended for a miniature x-ray source

Rangsten, Pelle; Ribbing, Carolina; Strandman, Carola; Hollman, Patrik et al.

Ingår i Transducers´99, Digest of Technical Papers Vol 1, Sendai, Japan, June 7-10, s. 208-211, 1999

Weibull fracture probability for silicon wafer bond evaluation

Köhler, Johan; Jonsson, Kerstin; Greek, Staffan; Stenmark, Lars et al.

Ingår i 5th International Symposium Semicond. Wafer Bonding, Honolulu, 1999

Design of a Chip Based Microanalytical Fluidic System Based on Electrochemical Detection using Redox Cycling

Richard, Åse; Klett, Oliver; Strandman, Carola; Bäcklund, Ylva et al.

Ingår i Proc Int Eng Congress and Exposition, Nashville, Tenessee, Nov 14-19, 1999, 1999

Space qualification of direct bonded silicon microsystems

Köhler, Johan; Jonsson, Kerstin; Jönsson, Mats; Stenmark, Lars et al.

Ingår i Micro Nano Technology for Space Applications, Pasadena, Calif., USA, 1999

Decreasing the optical path length in optoelectronic module using silicon micromachining

Rangsten, Pelle; Richard, Åse; Strandman, Carola; Bäcklund, Ylva

Ingår i Conf. proc. Micro Mechanics Europe MME'98, 3-5 June, Ulvik, Norway, s. 92-96, 1998

Silicon semi-circular tapered structures made by diffusion limited HF:HNO3 wet etching

Bakke, T; Köhler, Johan; Bäcklund, Ylva; Mukherjee, S

Ingår i Micromechanics Europe 1988, MME'98, Ulvik Norge, 1998

Investigation of the etch behaviour around the <111> etch minima

Vangbo, Mattias; Bäcklund, Ylva

Ingår i Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998

Wet etching of single crystal quartz

Bäcklund, Ylva; Vangbo, Mattias; Rangsten, Pelle; Hedlund, Christer

Ingår i Workshop of Physical Chemistry of Wet Chemical Etching of Silicon, May 17-19, Holten, The Netherlands, 1998

A large micromachined resonant scanning mirror

Vangbo, Mattias; Karlsson, Staffan; Bäcklund, Ylva

Ingår i MSW´98 (Micro Structure Workshop), 25-26 March, Uppsala Sweden, 1998

Low cost micromachined mirrors for display systems

Vangbo, Mattias; Karlsson, Staffan; Bäcklund, Ylva

Ingår i MME'98 (Micro Mechanics Europe), June 3-5 1998, Ulvang, Norway, 1998

Micro propulsion thrusters for space applications

Stenmark, Lars; Bäcklund, Ylva; Köhler, Johan; Larsson, K et al.

Ingår i MSW´98, Micro Structure Workshop, March 25-26, Uppsala, Sweden, 1998

Cold Gas Thrusters Micromachined in silicon-Design Plan

Köhler, J; Bäcklund, Ylva; Stenamrk, L; Backe, T et al.

Ingår i 2nd Round Table on Micro-Nano Technologies for Space, ESTEC, Noordwijk, The Nederlands, 15-17 October, 1997, 1997

Analytical modelling of fibre holding elements in silicon

Strandman, Carola; Gupta, Ram; Bäcklund, Ylva

Ingår i MOEMS´97 Nov 18-21, Nara, Japan, 1997

Cold gas thrusters micromachined in silicon and design plan

Köhler, Johan; Bäcklund, Ylva; Stenmark, Lars; Bakke, T et al.

Ingår i ESTEC, Noordwijk, The Netherlands, Oct 15-17, 1997

Etching through Si-Si direct bonded interfaces

Köhler, Johan; Vallin, Örjan; Strandman, Carola; Hedlund, Christer et al.

Ingår i MME´97, 1997

Cold Gas thrusters Micromachined in silicon - Design plan

Köhler, Johan; Bäcklund, Ylva; Stenmark, Lars; Backe, T et al.

Ingår i 2nd Round Table on Micro-Nano Technologies for space, ESTEC, Noordwijk NL, 1997

Quartz-Quartz Bonding

Rangsten, Pelle; Vallin, Örjan; Hermansson, Karin; Bäcklund, Ylva

Ingår i ECS Annual meeting, 1997

Etching through Si-Si direct bonded interfaces

Köhler, Johan; Wallin, Örjan; Strandman, Carola; Hedlund, Christer et al.

Ingår i MME' 97, 1997

Micromechanics in optical microsystems - with focus on telecom systems

Bäcklund, Ylva

Ingår i MME´96, Barcelona, Spain, Oct 21-22, 1996

An experimental study and simulation of anisotropic wet etching of quartz

Rangsten, Pelle; Hedlund, Christer; Katardjiev, Ilia; Bäcklund, Ylva

Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996

Passive alignment and holding of devices using flexible tongues formed by selective etching

Strandman, Carola; Bäcklund, Ylva

Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996

A lateral symmetrically bistable buckled beam

Vangbo, Mattias; Bäcklund, Ylva

Ingår i MME´96, Oct 21-22. Barcelona, Spain, 1996

Fabrication of bulk silicon holding structures for mounting of optical fibres in V-grooves

Strandman, Carola; Bäcklund, Ylva

Ingår i The SPIE conf on Micromachining and Microfabrication ´95, Oct 23-24, Austin, USA, 1995

The wheatstone GADGET, a simple circuit for measuring differential resistance variations

de Bree, H-E; Leussink, P; Korthurst, T; Bäcklund, Ylva et al.

Ingår i Proc fo the 6th Micromachined Europé Workshop MME´95, Copenhagen, Denmark, Sept 3-5, 1995

Terracing of (100)-Si with one mask and one etching step using misaligned V-grooves

Vangbo, Mattias; Strandman, Carola; Bäcklund, Ylva

Ingår i Proc of the 6th Micromechanics Europé Workshop MME´95, Copenhagen, Denmark, 3-5 Sept, 1995

A method for the determination of the angular dependence during dry etching

Hedlund, Christer; Strandman, Carola; Katardjiev, Ilia; Bäcklund, Ylva et al.

Ingår i The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995