Micro- and Nanotechnology I
5 credits
Reading list, Master's level, 1TE015
A revised version of the reading list is available.
Main group 1
- Franssila, Sami., Introduction to Microfabrication, 2nd ed., Hoboken, John Wiley & Sons, Ltd., 2010Compulsory
- Edwin Dertien; Paul P.L. Regtien, "Sensors for Mechatronics, 2nd Edition", 2018Compulsory
* Compulsory
Syllabus
- Syllabus valid from Autumn 2023, version 2
- Syllabus valid from Autumn 2023, version 1
- Syllabus valid from Autumn 2022
- Syllabus valid from Autumn 2021
- Syllabus valid from Autumn 2020
- Syllabus valid from Autumn 2019
- Syllabus valid from Autumn 2013
- Syllabus valid from Autumn 2012, version 2
- Syllabus valid from Autumn 2012, version 1
- Syllabus valid from Autumn 2010