Zhen Zhang
Professor in solid-state electronics at Department of Electrical Engineering; Solid-State Electronics
- Telephone:
- +46 18 471 31 31
- E-mail:
- zhen.zhang@angstrom.uu.se
- Visiting address:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postal address:
- Box 65
751 03 UPPSALA
Short presentation
Please see my group website in the link below:

Publications
Recent publications
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Stability and reliability of carbon-coated solid-state nanopores for single molecule analysis
Part of Nanotechnology, 2026
- DOI for Stability and reliability of carbon-coated solid-state nanopores for single molecule analysis
- Download full text (pdf) of Stability and reliability of carbon-coated solid-state nanopores for single molecule analysis
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Part of Science Advances, 2026
- DOI for A lab-on-a-silicon-chip platform for all-electrical antibiotic susceptibility tests with a sample-to-results time within 20 minutes
- Download full text (pdf) of A lab-on-a-silicon-chip platform for all-electrical antibiotic susceptibility tests with a sample-to-results time within 20 minutes
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Part of ACS Applied Materials and Interfaces, p. 28009-28019, 2026
- DOI for Tuning TiO2 memristors by defect engineering: From short-term memory to recoverable long-term resistance states
- Download full text (pdf) of Tuning TiO2 memristors by defect engineering: From short-term memory to recoverable long-term resistance states
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Part of ACS Applied Materials and Interfaces, p. 28009-28019, 2026
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Part of ACS Nano, 2026
- DOI for A Nanopore-Gated Subattoliter Silicon Nanocavity for Single-Molecule Trapping and Analysis without Applying an External Force
- Download full text (pdf) of A Nanopore-Gated Subattoliter Silicon Nanocavity for Single-Molecule Trapping and Analysis without Applying an External Force
All publications
Articles in journal
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Stability and reliability of carbon-coated solid-state nanopores for single molecule analysis
Part of Nanotechnology, 2026
- DOI for Stability and reliability of carbon-coated solid-state nanopores for single molecule analysis
- Download full text (pdf) of Stability and reliability of carbon-coated solid-state nanopores for single molecule analysis
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Part of Science Advances, 2026
- DOI for A lab-on-a-silicon-chip platform for all-electrical antibiotic susceptibility tests with a sample-to-results time within 20 minutes
- Download full text (pdf) of A lab-on-a-silicon-chip platform for all-electrical antibiotic susceptibility tests with a sample-to-results time within 20 minutes
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Part of ACS Applied Materials and Interfaces, p. 28009-28019, 2026
- DOI for Tuning TiO2 memristors by defect engineering: From short-term memory to recoverable long-term resistance states
- Download full text (pdf) of Tuning TiO2 memristors by defect engineering: From short-term memory to recoverable long-term resistance states
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Part of ACS Applied Materials and Interfaces, p. 28009-28019, 2026
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Part of ACS Nano, 2026
- DOI for A Nanopore-Gated Subattoliter Silicon Nanocavity for Single-Molecule Trapping and Analysis without Applying an External Force
- Download full text (pdf) of A Nanopore-Gated Subattoliter Silicon Nanocavity for Single-Molecule Trapping and Analysis without Applying an External Force
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Part of Applied Surface Science, 2026
- DOI for Probing formation and epitaxy of ultrathin titanium silicide using low and medium energy ion scattering
- Download full text (pdf) of Probing formation and epitaxy of ultrathin titanium silicide using low and medium energy ion scattering
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Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
Part of Superconductors Science and Technology, 2025
- DOI for Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
- Download full text (pdf) of Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
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Part of Sensors and actuators. B, Chemical, 2025
- DOI for Integration of AC bias-stabilized SiNRFETs with microscale Ag/AgCl pseudo-reference electrodes for lab-on-chip biosensing application
- Download full text (pdf) of Integration of AC bias-stabilized SiNRFETs with microscale Ag/AgCl pseudo-reference electrodes for lab-on-chip biosensing application
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A Nanoribbon-Based Ion-Gated Lateral Bipolar Amplifier for Ion Sensing
Part of IEEE Transactions on Electron Devices, p. 4362-4367, 2024
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Self-aligned formation of superconducting sub-5 nm PtSi films
Part of APL Quantum, 2024
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Part of Nature Communications, 2024
- DOI for Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles
- Download full text (pdf) of Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles
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Part of Nano-Micro Letters, 2024
- DOI for Wafer-Scale Ag2S-based Memristive Crossbar Arrays with Ultra-low Switching-energies Reaching Biological Synapses
- Download full text (pdf) of Wafer-Scale Ag2S-based Memristive Crossbar Arrays with Ultra-low Switching-energies Reaching Biological Synapses
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Interface Resistance-Switching with Reduced Cyclic Variations for Reliable Neuromorphic Computing
Part of Journal of Physics D, 2024
- DOI for Interface Resistance-Switching with Reduced Cyclic Variations for Reliable Neuromorphic Computing
- Download full text (pdf) of Interface Resistance-Switching with Reduced Cyclic Variations for Reliable Neuromorphic Computing
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Shallow junction formation via lateral boron autodoping during rapid thermal process
Part of Journal of Physics D, 2023
- DOI for Shallow junction formation via lateral boron autodoping during rapid thermal process
- Download full text (pdf) of Shallow junction formation via lateral boron autodoping during rapid thermal process
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Part of Nanoscale, p. 11107-11114, 2023
- DOI for Surface-particle interactions control the escape time of a particle from a nanopore-gated nanocavity system: a coarse grained simulation
- Download full text (pdf) of Surface-particle interactions control the escape time of a particle from a nanopore-gated nanocavity system: a coarse grained simulation
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Docking and Activity of DNA Polymerase on Solid-State Nanopores
Part of ACS Sensors, p. 1476-1483, 2022
- DOI for Docking and Activity of DNA Polymerase on Solid-State Nanopores
- Download full text (pdf) of Docking and Activity of DNA Polymerase on Solid-State Nanopores
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Part of Small, 2022
- DOI for Direct Transition from Ultrathin Orthorhombic Dinickel Silicides to Epitaxial Nickel Disilicide Revealed by In Situ Synthesis and Analysis
- Download full text (pdf) of Direct Transition from Ultrathin Orthorhombic Dinickel Silicides to Epitaxial Nickel Disilicide Revealed by In Situ Synthesis and Analysis
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Part of ACS Applied Materials and Interfaces, p. 43482-43489, 2022
- DOI for Full-Inorganic Flexible Ag2S Memristor with Interface Resistance–Switching for Energy-Efficient Computing
- Download full text (pdf) of Full-Inorganic Flexible Ag2S Memristor with Interface Resistance–Switching for Energy-Efficient Computing
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DNA compaction and dynamic observation in a nanopore gated sub-attoliter silicon nanocavity
Part of Nanoscale, p. 12038-12047, 2022
- DOI for DNA compaction and dynamic observation in a nanopore gated sub-attoliter silicon nanocavity
- Download full text (pdf) of DNA compaction and dynamic observation in a nanopore gated sub-attoliter silicon nanocavity
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Flexible thermoelectrics based on ductile semiconductors
Part of Science, p. 854-858, 2022
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Phase-modulated mechanical and thermoelectric properties of Ag2S1-x Tex ductile semiconductors
Part of Journal of Materiomics, p. 656-661, 2022
- DOI for Phase-modulated mechanical and thermoelectric properties of Ag2S1-x Tex ductile semiconductors
- Download full text (pdf) of Phase-modulated mechanical and thermoelectric properties of Ag2S1-x Tex ductile semiconductors
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Detection of Gingipain Activity Using Solid State Nanopore Sensors
Part of Sensors and actuators. B, Chemical, 2022
- DOI for Detection of Gingipain Activity Using Solid State Nanopore Sensors
- Download full text (pdf) of Detection of Gingipain Activity Using Solid State Nanopore Sensors
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High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
Part of ACS Applied Materials and Interfaces, p. 21173-21180, 2022
- DOI for High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
- Download full text (pdf) of High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
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All-electrical antibiotic susceptibility testing within 30 min using silicon nano transistors
Part of Sensors and actuators. B, Chemical, 2022
- DOI for All-electrical antibiotic susceptibility testing within 30 min using silicon nano transistors
- Download full text (pdf) of All-electrical antibiotic susceptibility testing within 30 min using silicon nano transistors
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Part of IEEE Transactions on Electron Devices, p. 4667-4673, 2022
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Redox Buffering Effects in Potentiometric Detection of DNA Using Thiol-modified Gold Electrodes
Part of ACS Sensors, p. 2546-2552, 2021
- DOI for Redox Buffering Effects in Potentiometric Detection of DNA Using Thiol-modified Gold Electrodes
- Download full text (pdf) of Redox Buffering Effects in Potentiometric Detection of DNA Using Thiol-modified Gold Electrodes
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Facile one-step synthesis and enhanced photocatalytic activity of WC/ferroelectric nanocomposite
Part of Journal of Materials Chemistry A, p. 22861-22870, 2021
- DOI for Facile one-step synthesis and enhanced photocatalytic activity of WC/ferroelectric nanocomposite
- Download full text (pdf) of Facile one-step synthesis and enhanced photocatalytic activity of WC/ferroelectric nanocomposite
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Improving Selectivity of Ion-Sensitive Membrane by Polyethylene Glycol Doping
Part of Sensors and actuators. B, Chemical, 2021
- DOI for Improving Selectivity of Ion-Sensitive Membrane by Polyethylene Glycol Doping
- Download full text (pdf) of Improving Selectivity of Ion-Sensitive Membrane by Polyethylene Glycol Doping
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Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
Part of ACS Nano, p. 17938-17946, 2021
- DOI for Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
- Download full text (pdf) of Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
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Part of Science Advances, 2021
- DOI for Ion sensing with single charge resolution using sub-10-nm electrical double layer-gated silicon nanowire transistors
- Download full text (pdf) of Ion sensing with single charge resolution using sub-10-nm electrical double layer-gated silicon nanowire transistors
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Part of IEEE Electron Device Letters, p. 469-472, 2021
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Part of Applied Surface Science, 2021
- DOI for In-situ nanoscale characterization of composition and structure during formation of ultrathin nickel silicide
- Download full text (pdf) of In-situ nanoscale characterization of composition and structure during formation of ultrathin nickel silicide
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Crystalline Structure-Dependent Mechanical and Thermoelectric Performance in Ag2Se1-xSx System
Part of Research, 2020
- DOI for Crystalline Structure-Dependent Mechanical and Thermoelectric Performance in Ag2Se1-xSx System
- Download full text (pdf) of Crystalline Structure-Dependent Mechanical and Thermoelectric Performance in Ag2Se1-xSx System
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Mechanism and kinetics of lipid bilayer formation in solid-state nanopores
Part of Langmuir, p. 1446-1453, 2020
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A Nanopore Array of Individual Addressability Enabled by Integrating Microfluidics and a Multiplexer
Part of IEEE Sensors Journal, p. 1558-1563, 2020
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Estimating Detection Limits of Potentiometric DNA sensors Using Surface Plasmon Resonance Analyses
Part of ACS Sensors, p. 217-224, 2020
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Ultrahigh field-induced strain in lead-free ceramics
Part of Nano Energy, 2020
- DOI for Ultrahigh field-induced strain in lead-free ceramics
- Download full text (pdf) of Ultrahigh field-induced strain in lead-free ceramics
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Part of Advanced Energy Materials, 2020
- DOI for Domain Wall Free Polar Structure Enhanced Photodegradation Activity in Nanoscale Ferroelectric BaxSr1-xTiO3
- Download full text (pdf) of Domain Wall Free Polar Structure Enhanced Photodegradation Activity in Nanoscale Ferroelectric BaxSr1-xTiO3
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Synergy of Ionic and Dipolar Effects by Molecular Design for pH Sensing beyond the Nernstian Limit
Part of Advanced Science, 2020
- DOI for Synergy of Ionic and Dipolar Effects by Molecular Design for pH Sensing beyond the Nernstian Limit
- Download full text (pdf) of Synergy of Ionic and Dipolar Effects by Molecular Design for pH Sensing beyond the Nernstian Limit
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In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
Part of Scientific Reports, 2020
- DOI for In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
- Download full text (pdf) of In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
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Part of IEEE Electron Device Letters, p. 4-7, 2020
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Part of Advanced Materials, 2020
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Dynamics of DNA Clogging in Hafnium Oxide Nanopores
Part of Journal of Physical Chemistry B, p. 11573-11583, 2020
- DOI for Dynamics of DNA Clogging in Hafnium Oxide Nanopores
- Download full text (pdf) of Dynamics of DNA Clogging in Hafnium Oxide Nanopores
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Part of Sensors and actuators. B, Chemical, 2020
- DOI for Peptide Decorated Gold Nanoparticle/Carbon Nanotube Electrochemical Sensor for Ultrasensitive Detection of Matrix Metalloproteinase-7
- Download full text (pdf) of Peptide Decorated Gold Nanoparticle/Carbon Nanotube Electrochemical Sensor for Ultrasensitive Detection of Matrix Metalloproteinase-7
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Part of Microchimica Acta, 2020
- DOI for Voltammetric sensing of recombinant viral dengue virus 2 NS1 based on Au nanoparticle–decorated multiwalled carbon nanotube composites
- Download full text (pdf) of Voltammetric sensing of recombinant viral dengue virus 2 NS1 based on Au nanoparticle–decorated multiwalled carbon nanotube composites
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Rapid Four-Point Sweeping Method to Investigate Hysteresis of MoS2 FET
Part of IEEE Electron Device Letters, p. 1356-1359, 2020
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Part of IEEE Electron Device Letters, p. 800-803, 2020
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Part of ACS Sensors, p. 427-433, 2019
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Part of IEEE Journal of the Electron Devices Society, p. 696-700, 2019
- DOI for Top-bottom gate coupling effect on low frequency noise in a Schottky junction gated silicon nanowire field-effect transistor
- Download full text (pdf) of Top-bottom gate coupling effect on low frequency noise in a Schottky junction gated silicon nanowire field-effect transistor
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Autogenic analyte translocation in nanopores
Part of Nano Energy, p. 503-509, 2019
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Rectification of protein translocation in truncated-pyramidal nanopores
Part of Nature Nanotechnology, p. 1056-1062, 2019
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Part of Nanotechnology, 2019
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On rectification of ionic current in nanopores
Part of Analytical Chemistry, p. 14597-14604, 2019
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Low-Noise Schottky Junction Trigate Silicon Nanowire Field-effect Transistor for Charge Sensing
Part of IEEE Transactions on Electron Devices, p. 3994-4000, 2019
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Metal Filling by High Power Impulse Magnetron Sputtering
Part of Journal of Physics D, 2019
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Part of Analytical Chemistry, p. 14697-14704, 2019
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Revisiting the factors influencing gold electrodes prepared using cyclic voltammetry
Part of Sensors and actuators. B, Chemical, p. 146-153, 2019
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Electronic interaction of slow hydrogen and helium ions with nickel-silicon systems
Part of Physical Review A: covering atomic, molecular, and optical physics and quantum information, 2019
- DOI for Electronic interaction of slow hydrogen and helium ions with nickel-silicon systems
- Download full text (pdf) of Electronic interaction of slow hydrogen and helium ions with nickel-silicon systems
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Protein sensing beyond the Debye Length Using Graphene Field-effect Transistors
Part of IEEE Sensors Journal, p. 6497-6503, 2018
- DOI for Protein sensing beyond the Debye Length Using Graphene Field-effect Transistors
- Download full text (pdf) of Protein sensing beyond the Debye Length Using Graphene Field-effect Transistors
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Part of Sensors and actuators. B, Chemical, p. 363-369, 2018
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Nanoarrays on Passivated Aluminum Surface for Site-Specific Immobilization of Biomolecules
Part of ACS Applied Bio Materials, p. 125-135, 2018
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Multiplexed analysis of molecular and elemental ions using nanowire transistor sensors
Part of Sensors and actuators. B, Chemical, p. 89-96, 2018
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Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Part of Applied Physics Letters, 2018
- DOI for Improving the morphological stability of nickel germanide by tantalum and tungsten additions
- Download full text (pdf) of Improving the morphological stability of nickel germanide by tantalum and tungsten additions
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Group behavior of nanoparticles translocating multiple nanopores
Part of Analytical Chemistry, p. 13483-13490, 2018
- DOI for Group behavior of nanoparticles translocating multiple nanopores
- Download full text (pdf) of Group behavior of nanoparticles translocating multiple nanopores
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Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Part of Applied Physics Letters, 2018
- DOI for Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
- Download full text (pdf) of Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
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Part of Nano Energy, p. 723-732, 2018
- DOI for Perovskite Sr-x(Bi1-xNa0.97-xLi0.03)(0.5)TiO3 ceramics with polar nano regions for high power energy storage
- Download full text (pdf) of Perovskite Sr-x(Bi1-xNa0.97-xLi0.03)(0.5)TiO3 ceramics with polar nano regions for high power energy storage
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Part of ACS Applied Materials and Interfaces, p. 26610-26621, 2017
- DOI for Systematic approach to the development of microfabricated biosensors: relationship between the gold surface pretreatment and thiolated molecule binding
- Download full text (pdf) of Systematic approach to the development of microfabricated biosensors: relationship between the gold surface pretreatment and thiolated molecule binding
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Physical Model for Rapid and Accurate Determination of Nanopore Size via Conductance Measurement
Part of ACS Sensors, p. 1523-1530, 2017
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Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
Part of ACS Sensors, p. 1160-1166, 2017
- DOI for Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
- Download full text 1 (pdf) of Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
- Download full text 2 (pdf) of Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
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Generalized Noise Study of Solid-State Nanopores at Low Frequencies
Part of ACS Sensors, p. 300-307, 2017
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Biomimetic supercontainers for size-selective electrochemical sensing of molecular ions
Part of Scientific Reports, 2017
- DOI for Biomimetic supercontainers for size-selective electrochemical sensing of molecular ions
- Download full text (pdf) of Biomimetic supercontainers for size-selective electrochemical sensing of molecular ions
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Formation of nickel germanides from Ni layers with thickness below 10 nm
Part of Journal of Vacuum Science & Technology B, 2017
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On nanopore DNA sequencing by signal and noise analysis of ionic current
Part of Nanotechnology, 2016
- DOI for On nanopore DNA sequencing by signal and noise analysis of ionic current
- Download full text (pdf) of On nanopore DNA sequencing by signal and noise analysis of ionic current
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Aged hydrogen silsesquioxane for sub-10 nm line patterns
Part of Microelectronic Engineering, p. 105-109, 2016
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Direct assessment of solid–liquid interface noise in ion sensing using a differentialmethod
Part of Applied Physics Letters, 2016
- DOI for Direct assessment of solid–liquid interface noise in ion sensing using a differentialmethod
- Download full text (pdf) of Direct assessment of solid–liquid interface noise in ion sensing using a differentialmethod
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End-Bonded Mo2C Contacts for Carbon Nanotube Transistors with Low, Size-Independent Resistance
Part of Science, 2015
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Ultra low contact resistivities for CMOS beyond 10nm node
Part of IEEE Electron Device Letters, p. 723-725, 2013
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Probing the interface barriers of dopant-segregated silicide-Si diodes with internal photoemission
Part of IEEE Transactions on Electron Devices, p. 2027, 2012
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Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Part of Electrochemical and solid-state letters, 2011
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Part of Applied Physics Letters, p. 252108, 2010
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Interaction of NiSi with dopants for metallic source/drain applications
Part of Journal of Vacuum Science & Technology B, 2010
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Part of Applied Physics Letters, 2010
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Surface-energy triggered phase formation and epitaxy in nanometer-thick Ni1−xPtx silicide films
Part of Applied Physics Letters, 2010
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Part of Applied Physics Letters, p. 252108, 2010
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Surface-energy triggered phase formation and epitaxy in nanometer-thick Ni1−xPtx silicide films
Part of Applied Physics Letters, 2010
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Part of Applied Physics Letters, 2010
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Interaction of NiSi with dopants for metallic source/drain applications
Part of Journal of Vacuum Science & Technology B, p. 1071, 2010
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Part of IEEE Electron Device Letters, p. 275-277, 2010
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Part of IEEE Electron Device Letters, p. 731-733, 2010
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Performance fluctuation of FinFETs with Schottky barrier source/drain
Part of IEEE Electron Device Letters, p. 506-508, 2008
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Single Charge Detection in Liquid Sample Using Sub-10 nm Silicon Nanowire Transistors
Conference papers
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Visualization of DNA Translocation and Clogging Using Photoluminescent-Free Silicon Nanopore Arrays
Part of 2020 IEEE 20th International Conference on Nanotechnology (IEEE-NANO), p. 193-197, 2020
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Optical Monitoring of Single Nanoparticle Capture in a Solid-State Nanopore Array
2019
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Nanoparticle Localization on Solid-State Nanopores Via Electrophoretic Force
Part of 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), p. 2372-2375, 2019
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Signal and Noise Properties of Translocation Current in Multiple-Nanopore Sensors
2019
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Symmetric Lateral Bipolar Transistors as Low Noise Signal Amplifier
2019
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Translocation properties of analytes through asymmetric nanopores
2019
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A novel gate junction design for low noise Si Nanowire ISFET Sensor application
2019
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Current gain and low-frequency noise of symmetric lateral bipolar junction transistors on SOI
Part of 2018 48th European Solid-State Device Research Conference (ESSDERC), p. 258-261, 2018
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Considerations for the Cyclic Voltammetry of Gold in Sulfuric Acid Solutions
2018
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2018
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Single molecule detection via solid state carbon nanopore
2018
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2017
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Scalability Study of Nickel Germanides
2016
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Metallization of nanostructures by High Power Impulse Magnetron Sputtering
Part of 4 th Magnetron, Ion processing & Arc Technologies European Conference, Paris, 8-11 December 2015, 2015
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Subtractive W Contact and Local Interconnect Co-integration (CLIC)
2013
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Silicide Contact Resistivity and Phase Formation for Extremely Scaled CMOS Device Applications
2012
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Advanced contact technology: from material properties to device applications
2012
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Interconnect Material Choices for Future Scaled Devices
2012
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A 0.021 mm2 trigate SRAM cell with aggressively scaled gate and contact pitch
p. 64-65, 2011
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p. 128-129, 2011
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2010
Conference proceedings (editor)
Manuscripts (preprints)
Patents
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A device, a system and a method for performing antibiotic susceptibility tests
2023
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Method for producing a superconducting transistor
2023
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2022
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SEMICONDUCTOR DEVICE INCLUDING DUAL-LAYER SOURCE/DRAIN REGION
2015
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REPLACEMENT GATE SELF-ALIGNED CARBON NANOSTRUCTURE TRANSISTOR
2013
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COLORIMETRIC RADIATION DOSIMETRY BASED ON FUNCTIONAL POLYMER AND GOLD NANOPARTICLE HYBRID
2013
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JANUS COMPLEMENTARY MEMS TRANSISTORS AND CIRCUITS
2013
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CARBON-DOPED CAP FOR A RAISED ACTIVE SEMICONDUCTOR REGION
2013
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FACETED SEMICONDUCTOR NANOWIRE
2013
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TECHNIQUES FOR FABRICATING JANUS SENSOR
2013
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2013
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REDUCING CONTACT RESISTANCE BY DIRECTED SELF-ASSEMBLING
2013
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USE BAND-EDGE GATE METALS AS THE CONTACTS TO THE SOURCE AND DRAIN OF CMOS DEVICES
2012
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USING FAST ANNEAL TO FORM UNIFORM NI(PT)SI(GE) CONTACTS ON SIGE LAYER
2012
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DUAL SILICIDE PROCESS COMPATIBLE WITH A REPLACEMENT-METAL-GATE
2012
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STRUCTURE AND METHOD TO FORM UNIFORM AND STABLE SILICIDE
2012
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METHOD TO FABRICATE MULTICRYSTAL SOLAR CELL WITH LIGHT TRAPPING SURFACE USING NANOPORE COPOLYMER
2012
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NIOBIUM THIN FILM STRESS RELIEVING LAYER FOR THIN-FILM SOLAR CELLS
2012
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A METHOD TO FORM SILICIDE CONTACT IN TRENCHES
2012
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SCHOTTKY FET WITH ALL METAL GATE
2012
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2012
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INTERFACE ENGINEERING TO OPTIMIZE METAL-III-V CONTACTS
2012
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SCHOTTKY BARRIER SOLAR CELLS WITH HIGH AND LOW WORK FUNCTION METAL CONTACTS,
2011
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2011
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DEPOSITION ON A NANOWIRE USING ATOMIC LAYER DEPOSITION
2011
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SILICIDE MICROMECHANICAL DEVICE AND METHODS TO FABRICATE SAME
2011
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2011
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METAL-SEMICONDUCTOR INTERMIXED REGIONS
2011
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STABILIZED NICKEL SILICIDE INTERCONNECTS
2011
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SELF-ALIGNED BOTTOM PLATE FOR MHK MIM FOR EDRAM APPLICATIONS
2011
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2010
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2010
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2010
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INTERMIXED SILICIDE FOR REDUCTION OF EXTERNAL RESISTANCE IN INTEGRATED CIRCUIT DEVICES
2010
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2010
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SILICON ON INSULATOR FIELD EFFECT DEVICE
2010
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CONTACT RESISTIVITY REDUCTION BY DEEP LEVEL IMPURITIES
2010
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SCHOTTKY FET FABRICATED WITH GATE LAST PROCESS
2010
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METHOD TO REDUCE JUNCTION LEAKAGE
2010
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2010
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A SCHOTTKY JUNCTION SI NANOWIRE/NANOBELT FIELD-EFFECT BIO-SENSOR/MOLECULE DETECTOR
2010
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IMPLANTLESS DOPANT SEGREGATION PROCESS FOR SILICIDE CONTACTS
2010
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2010
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METHOD TO CONTROL METAL SEMICONDUCTOR MICRO-STRUCTURE
2010
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SOI SCHOTTKY SOURCE/DRAIN DEVICE STRUCTURE TO CONTROL ENCROACHMENT AND DELAMINATION OF SILICIDE
2010
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MULTIGATE STRUCTURE FORMED WITH ELECTROLESS METAL DEPOSITION
2010
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FET WITH FUSI GATE AND REDUCED SOURCE/DRAIN CONTACT RESISTANCE
2010