Zhen Zhang
Professor at Department of Electrical Engineering; Solid-State Electronics
- Telephone:
- +46 18 471 31 31
- E-mail:
- zhen.zhang@angstrom.uu.se
- Visiting address:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postal address:
- Box 65
751 03 UPPSALA
Short presentation
Please see my group website in the link below:

Publications
Recent publications
Part of Sensors and actuators. B, Chemical, 2025
- DOI for Integration of AC bias-stabilized SiNRFETs with microscale Ag/AgCl pseudo-reference electrodes for lab-on-chip biosensing application
- Download full text (pdf) of Integration of AC bias-stabilized SiNRFETs with microscale Ag/AgCl pseudo-reference electrodes for lab-on-chip biosensing application
A Nanoribbon-Based Ion-Gated Lateral Bipolar Amplifier for Ion Sensing
Part of IEEE Transactions on Electron Devices, p. 4362-4367, 2024
Self-aligned formation of superconducting sub-5 nm PtSi films
Part of APL Quantum, 2024
Part of Nature Communications, 2024
- DOI for Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles
- Download full text (pdf) of Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles
Part of Nano-Micro Letters, 2024
- DOI for Wafer-Scale Ag2S-based Memristive Crossbar Arrays with Ultra-low Switching-energies Reaching Biological Synapses
- Download full text (pdf) of Wafer-Scale Ag2S-based Memristive Crossbar Arrays with Ultra-low Switching-energies Reaching Biological Synapses
All publications
Articles in journal
Part of Sensors and actuators. B, Chemical, 2025
- DOI for Integration of AC bias-stabilized SiNRFETs with microscale Ag/AgCl pseudo-reference electrodes for lab-on-chip biosensing application
- Download full text (pdf) of Integration of AC bias-stabilized SiNRFETs with microscale Ag/AgCl pseudo-reference electrodes for lab-on-chip biosensing application
A Nanoribbon-Based Ion-Gated Lateral Bipolar Amplifier for Ion Sensing
Part of IEEE Transactions on Electron Devices, p. 4362-4367, 2024
Self-aligned formation of superconducting sub-5 nm PtSi films
Part of APL Quantum, 2024
Part of Nature Communications, 2024
- DOI for Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles
- Download full text (pdf) of Nanotransistor-based gas sensing with record-high sensitivity enabled by electron trapping effect in nanoparticles
Part of Nano-Micro Letters, 2024
- DOI for Wafer-Scale Ag2S-based Memristive Crossbar Arrays with Ultra-low Switching-energies Reaching Biological Synapses
- Download full text (pdf) of Wafer-Scale Ag2S-based Memristive Crossbar Arrays with Ultra-low Switching-energies Reaching Biological Synapses
Interface Resistance-Switching with Reduced Cyclic Variations for Reliable Neuromorphic Computing
Part of Journal of Physics D, 2024
- DOI for Interface Resistance-Switching with Reduced Cyclic Variations for Reliable Neuromorphic Computing
- Download full text (pdf) of Interface Resistance-Switching with Reduced Cyclic Variations for Reliable Neuromorphic Computing
Shallow junction formation via lateral boron autodoping during rapid thermal process
Part of Journal of Physics D, 2023
- DOI for Shallow junction formation via lateral boron autodoping during rapid thermal process
- Download full text (pdf) of Shallow junction formation via lateral boron autodoping during rapid thermal process
Part of Nanoscale, p. 11107-11114, 2023
- DOI for Surface-particle interactions control the escape time of a particle from a nanopore-gated nanocavity system: a coarse grained simulation
- Download full text (pdf) of Surface-particle interactions control the escape time of a particle from a nanopore-gated nanocavity system: a coarse grained simulation
Docking and Activity of DNA Polymerase on Solid-State Nanopores
Part of ACS Sensors, p. 1476-1483, 2022
- DOI for Docking and Activity of DNA Polymerase on Solid-State Nanopores
- Download full text (pdf) of Docking and Activity of DNA Polymerase on Solid-State Nanopores
Part of Small, 2022
- DOI for Direct Transition from Ultrathin Orthorhombic Dinickel Silicides to Epitaxial Nickel Disilicide Revealed by In Situ Synthesis and Analysis
- Download full text (pdf) of Direct Transition from Ultrathin Orthorhombic Dinickel Silicides to Epitaxial Nickel Disilicide Revealed by In Situ Synthesis and Analysis
Part of ACS Applied Materials and Interfaces, p. 43482-43489, 2022
- DOI for Full-Inorganic Flexible Ag2S Memristor with Interface Resistance–Switching for Energy-Efficient Computing
- Download full text (pdf) of Full-Inorganic Flexible Ag2S Memristor with Interface Resistance–Switching for Energy-Efficient Computing
DNA compaction and dynamic observation in a nanopore gated sub-attoliter silicon nanocavity
Part of Nanoscale, p. 12038-12047, 2022
- DOI for DNA compaction and dynamic observation in a nanopore gated sub-attoliter silicon nanocavity
- Download full text (pdf) of DNA compaction and dynamic observation in a nanopore gated sub-attoliter silicon nanocavity
Flexible thermoelectrics based on ductile semiconductors
Part of Science, p. 854-858, 2022
Phase-modulated mechanical and thermoelectric properties of Ag2S1-x Tex ductile semiconductors
Part of Journal of Materiomics, p. 656-661, 2022
- DOI for Phase-modulated mechanical and thermoelectric properties of Ag2S1-x Tex ductile semiconductors
- Download full text (pdf) of Phase-modulated mechanical and thermoelectric properties of Ag2S1-x Tex ductile semiconductors
Detection of Gingipain Activity Using Solid State Nanopore Sensors
Part of Sensors and actuators. B, Chemical, 2022
- DOI for Detection of Gingipain Activity Using Solid State Nanopore Sensors
- Download full text (pdf) of Detection of Gingipain Activity Using Solid State Nanopore Sensors
High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
Part of ACS Applied Materials and Interfaces, p. 21173-21180, 2022
- DOI for High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
- Download full text (pdf) of High Performance Full-Inorganic Flexible Memristor with Combined Resistance-Switching
All-electrical antibiotic susceptibility testing within 30 min using silicon nano transistors
Part of Sensors and actuators. B, Chemical, 2022
- DOI for All-electrical antibiotic susceptibility testing within 30 min using silicon nano transistors
- Download full text (pdf) of All-electrical antibiotic susceptibility testing within 30 min using silicon nano transistors
Part of IEEE Transactions on Electron Devices, p. 4667-4673, 2022
Redox Buffering Effects in Potentiometric Detection of DNA Using Thiol-modified Gold Electrodes
Part of ACS Sensors, p. 2546-2552, 2021
- DOI for Redox Buffering Effects in Potentiometric Detection of DNA Using Thiol-modified Gold Electrodes
- Download full text (pdf) of Redox Buffering Effects in Potentiometric Detection of DNA Using Thiol-modified Gold Electrodes
Facile one-step synthesis and enhanced photocatalytic activity of WC/ferroelectric nanocomposite
Part of Journal of Materials Chemistry A, p. 22861-22870, 2021
- DOI for Facile one-step synthesis and enhanced photocatalytic activity of WC/ferroelectric nanocomposite
- Download full text (pdf) of Facile one-step synthesis and enhanced photocatalytic activity of WC/ferroelectric nanocomposite
Improving Selectivity of Ion-Sensitive Membrane by Polyethylene Glycol Doping
Part of Sensors and actuators. B, Chemical, 2021
- DOI for Improving Selectivity of Ion-Sensitive Membrane by Polyethylene Glycol Doping
- Download full text (pdf) of Improving Selectivity of Ion-Sensitive Membrane by Polyethylene Glycol Doping
Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
Part of ACS Nano, p. 17938-17946, 2021
- DOI for Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
- Download full text (pdf) of Self-Limited Formation of Bowl-Shaped Nanopores for Directional DNA Translocation
Part of Science Advances, 2021
- DOI for Ion sensing with single charge resolution using sub-10-nm electrical double layer-gated silicon nanowire transistors
- Download full text (pdf) of Ion sensing with single charge resolution using sub-10-nm electrical double layer-gated silicon nanowire transistors
Part of IEEE Electron Device Letters, p. 469-472, 2021
Part of Applied Surface Science, 2021
- DOI for In-situ nanoscale characterization of composition and structure during formation of ultrathin nickel silicide
- Download full text (pdf) of In-situ nanoscale characterization of composition and structure during formation of ultrathin nickel silicide
Mechanism and kinetics of lipid bilayer formation in solid-state nanopores
Part of Langmuir, p. 1446-1453, 2020
A Nanopore Array of Individual Addressability Enabled by Integrating Microfluidics and a Multiplexer
Part of IEEE Sensors Journal, p. 1558-1563, 2020
Estimating Detection Limits of Potentiometric DNA sensors Using Surface Plasmon Resonance Analyses
Part of ACS Sensors, p. 217-224, 2020
Ultrahigh field-induced strain in lead-free ceramics
Part of Nano Energy, 2020
- DOI for Ultrahigh field-induced strain in lead-free ceramics
- Download full text (pdf) of Ultrahigh field-induced strain in lead-free ceramics
Part of Advanced Energy Materials, 2020
- DOI for Domain Wall Free Polar Structure Enhanced Photodegradation Activity in Nanoscale Ferroelectric BaxSr1-xTiO3
- Download full text (pdf) of Domain Wall Free Polar Structure Enhanced Photodegradation Activity in Nanoscale Ferroelectric BaxSr1-xTiO3
Synergy of Ionic and Dipolar Effects by Molecular Design for pH Sensing beyond the Nernstian Limit
Part of Advanced Science, 2020
- DOI for Synergy of Ionic and Dipolar Effects by Molecular Design for pH Sensing beyond the Nernstian Limit
- Download full text (pdf) of Synergy of Ionic and Dipolar Effects by Molecular Design for pH Sensing beyond the Nernstian Limit
In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
Part of Scientific Reports, 2020
- DOI for In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
- Download full text (pdf) of In-situ characterization of ultrathin nickel silicides using 3D medium-energy ion scattering
Part of IEEE Electron Device Letters, p. 4-7, 2020
Part of Advanced Materials, 2020
Dynamics of DNA Clogging in Hafnium Oxide Nanopores
Part of Journal of Physical Chemistry B, p. 11573-11583, 2020
- DOI for Dynamics of DNA Clogging in Hafnium Oxide Nanopores
- Download full text (pdf) of Dynamics of DNA Clogging in Hafnium Oxide Nanopores
Part of Sensors and actuators. B, Chemical, 2020
- DOI for Peptide Decorated Gold Nanoparticle/Carbon Nanotube Electrochemical Sensor for Ultrasensitive Detection of Matrix Metalloproteinase-7
- Download full text (pdf) of Peptide Decorated Gold Nanoparticle/Carbon Nanotube Electrochemical Sensor for Ultrasensitive Detection of Matrix Metalloproteinase-7
Part of Microchimica Acta, 2020
- DOI for Voltammetric sensing of recombinant viral dengue virus 2 NS1 based on Au nanoparticle–decorated multiwalled carbon nanotube composites
- Download full text (pdf) of Voltammetric sensing of recombinant viral dengue virus 2 NS1 based on Au nanoparticle–decorated multiwalled carbon nanotube composites
Crystalline Structure-Dependent Mechanical and Thermoelectric Performance in Ag2Se1-xSx System
Part of RESEARCH, 2020
- DOI for Crystalline Structure-Dependent Mechanical and Thermoelectric Performance in Ag2Se1-xSx System
- Download full text (pdf) of Crystalline Structure-Dependent Mechanical and Thermoelectric Performance in Ag2Se1-xSx System
Rapid Four-Point Sweeping Method to Investigate Hysteresis of MoS2 FET
Part of IEEE Electron Device Letters, p. 1356-1359, 2020
Part of IEEE Electron Device Letters, p. 800-803, 2020
Part of ACS Sensors, p. 427-433, 2019
Part of IEEE Journal of the Electron Devices Society, p. 696-700, 2019
- DOI for Top-bottom gate coupling effect on low frequency noise in a Schottky junction gated silicon nanowire field-effect transistor
- Download full text (pdf) of Top-bottom gate coupling effect on low frequency noise in a Schottky junction gated silicon nanowire field-effect transistor
Metal Filling by High Power Impulse Magnetron Sputtering
Part of Journal of Physics D, 2019
Rectification of protein translocation in truncated-pyramidal nanopores
Part of Nature Nanotechnology, p. 1056-1062, 2019
Part of Nanotechnology, 2019
On rectification of ionic current in nanopores
Part of Analytical Chemistry, p. 14597-14604, 2019
Autogenic analyte translocation in nanopores
Part of Nano Energy, p. 503-509, 2019
Low-Noise Schottky Junction Trigate Silicon Nanowire Field-effect Transistor for Charge Sensing
Part of IEEE Transactions on Electron Devices, p. 3994-4000, 2019
Part of Analytical Chemistry, p. 14697-14704, 2019
Electronic interaction of slow hydrogen and helium ions with nickel-silicon systems
Part of Physical Review A: covering atomic, molecular, and optical physics and quantum information, 2019
- DOI for Electronic interaction of slow hydrogen and helium ions with nickel-silicon systems
- Download full text (pdf) of Electronic interaction of slow hydrogen and helium ions with nickel-silicon systems
Revisiting the factors influencing gold electrodes prepared using cyclic voltammetry
Part of Sensors and actuators. B, Chemical, p. 146-153, 2019
Part of Sensors and actuators. B, Chemical, p. 363-369, 2018
Nanoarrays on Passivated Aluminum Surface for Site-Specific Immobilization of Biomolecules
Part of ACS Applied Bio Materials, p. 125-135, 2018
Multiplexed analysis of molecular and elemental ions using nanowire transistor sensors
Part of Sensors and actuators. B, Chemical, p. 89-96, 2018
Group behavior of nanoparticles translocating multiple nanopores
Part of Analytical Chemistry, p. 13483-13490, 2018
- DOI for Group behavior of nanoparticles translocating multiple nanopores
- Download full text (pdf) of Group behavior of nanoparticles translocating multiple nanopores
Protein sensing beyond the Debye Length Using Graphene Field-effect Transistors
Part of IEEE Sensors Journal, p. 6497-6503, 2018
Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Part of Applied Physics Letters, 2018
- DOI for Improving the morphological stability of nickel germanide by tantalum and tungsten additions
- Download full text (pdf) of Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Part of Applied Physics Letters, 2018
- DOI for Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
- Download full text (pdf) of Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Part of Nano Energy, p. 723-732, 2018
- DOI for Perovskite Sr-x(Bi1-xNa0.97-xLi0.03)(0.5)TiO3 ceramics with polar nano regions for high power energy storage
- Download full text (pdf) of Perovskite Sr-x(Bi1-xNa0.97-xLi0.03)(0.5)TiO3 ceramics with polar nano regions for high power energy storage
Part of ACS Applied Materials and Interfaces, p. 26610-26621, 2017
- DOI for Systematic approach to the development of microfabricated biosensors: relationship between the gold surface pretreatment and thiolated molecule binding
- Download full text (pdf) of Systematic approach to the development of microfabricated biosensors: relationship between the gold surface pretreatment and thiolated molecule binding
Physical Model for Rapid and Accurate Determination of Nanopore Size via Conductance Measurement
Part of ACS Sensors, p. 1523-1530, 2017
Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
Part of ACS Sensors, p. 1160-1166, 2017
- DOI for Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
- Download full text 1 (pdf) of Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
- Download full text 2 (pdf) of Correlation of Low-Frequency Noise to the Dynamic Properties of the Sensing Surface in Electrolytes
Generalized Noise Study of Solid-State Nanopores at Low Frequencies
Part of ACS Sensors, p. 300-307, 2017
Biomimetic supercontainers for size-selective electrochemical sensing of molecular ions
Part of Scientific Reports, 2017
- DOI for Biomimetic supercontainers for size-selective electrochemical sensing of molecular ions
- Download full text (pdf) of Biomimetic supercontainers for size-selective electrochemical sensing of molecular ions
Formation of nickel germanides from Ni layers with thickness below 10 nm
Part of Journal of Vacuum Science & Technology B, 2017
On nanopore DNA sequencing by signal and noise analysis of ionic current
Part of Nanotechnology, 2016
- DOI for On nanopore DNA sequencing by signal and noise analysis of ionic current
- Download full text (pdf) of On nanopore DNA sequencing by signal and noise analysis of ionic current
Aged hydrogen silsesquioxane for sub-10 nm line patterns
Part of Microelectronic Engineering, p. 105-109, 2016
Direct assessment of solid–liquid interface noise in ion sensing using a differentialmethod
Part of Applied Physics Letters, 2016
- DOI for Direct assessment of solid–liquid interface noise in ion sensing using a differentialmethod
- Download full text (pdf) of Direct assessment of solid–liquid interface noise in ion sensing using a differentialmethod
End-Bonded Mo2C Contacts for Carbon Nanotube Transistors with Low, Size-Independent Resistance
Part of Science, 2015
Ultra low contact resistivities for CMOS beyond 10nm node
Part of IEEE Electron Device Letters, p. 723-725, 2013
Probing the interface barriers of dopant-segregated silicide-Si diodes with internal photoemission
Part of IEEE Transactions on Electron Devices, p. 2027, 2012
Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Part of Electrochemical and solid-state letters, 2011
Part of Applied Physics Letters, p. 252108, 2010
Interaction of NiSi with dopants for metallic source/drain applications
Part of Journal of Vacuum Science & Technology B, 2010
Part of Applied Physics Letters, 2010
Surface-energy triggered phase formation and epitaxy in nanometer-thick Ni1−xPtx silicide films
Part of Applied Physics Letters, 2010
Part of Applied Physics Letters, p. 252108, 2010
Part of IEEE Electron Device Letters, p. 275-277, 2010
Interaction of NiSi with dopants for metallic source/drain applications
Part of Journal of Vacuum Science & Technology B, p. 1071, 2010
Part of Applied Physics Letters, 2010
Surface-energy triggered phase formation and epitaxy in nanometer-thick Ni1−xPtx silicide films
Part of Applied Physics Letters, 2010
Part of IEEE Electron Device Letters, p. 731-733, 2010
Performance fluctuation of FinFETs with Schottky barrier source/drain
Part of IEEE Electron Device Letters, p. 506-508, 2008
Single Charge Detection in Liquid Sample Using Sub-10 nm Silicon Nanowire Transistors
Conference papers
Visualization of DNA Translocation and Clogging Using Photoluminescent-Free Silicon Nanopore Arrays
Part of 2020 IEEE 20th International Conference on Nanotechnology (IEEE-NANO), p. 193-197, 2020
Optical Monitoring of Single Nanoparticle Capture in a Solid-State Nanopore Array
2019
Nanoparticle Localization on Solid-State Nanopores Via Electrophoretic Force
Part of 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), p. 2372-2375, 2019
Signal and Noise Properties of Translocation Current in Multiple-Nanopore Sensors
2019
Symmetric Lateral Bipolar Transistors as Low Noise Signal Amplifier
2019
Translocation properties of analytes through asymmetric nanopores
2019
A novel gate junction design for low noise Si Nanowire ISFET Sensor application
2019
Current gain and low-frequency noise of symmetric lateral bipolar junction transistors on SOI
Part of 2018 48th European Solid-State Device Research Conference (ESSDERC), p. 258-261, 2018
Considerations for the Cyclic Voltammetry of Gold in Sulfuric Acid Solutions
2018
2018
Single molecule detection via solid state carbon nanopore
2018
2017
Scalability Study of Nickel Germanides
2016
Metallization of nanostructures by High Power Impulse Magnetron Sputtering
Part of 4 th Magnetron, Ion processing & Arc Technologies European Conference, Paris, 8-11 December 2015, 2015
Subtractive W Contact and Local Interconnect Co-integration (CLIC)
2013
Silicide Contact Resistivity and Phase Formation for Extremely Scaled CMOS Device Applications
2012
Advanced contact technology: from material properties to device applications
2012
Interconnect Material Choices for Future Scaled Devices
2012
A 0.021 mm2 trigate SRAM cell with aggressively scaled gate and contact pitch
p. 64-65, 2011
p. 128-129, 2011
2010
Conference proceedings (editor)
Manuscripts (preprints)
Patents
A device, a system and a method for performing antibiotic susceptibility tests
2023
Method for producing a superconducting transistor
2023
2022
SEMICONDUCTOR DEVICE INCLUDING DUAL-LAYER SOURCE/DRAIN REGION
2015
CARBON-DOPED CAP FOR A RAISED ACTIVE SEMICONDUCTOR REGION
2013
FACETED SEMICONDUCTOR NANOWIRE
2013
TECHNIQUES FOR FABRICATING JANUS SENSOR
2013
COLORIMETRIC RADIATION DOSIMETRY BASED ON FUNCTIONAL POLYMER AND GOLD NANOPARTICLE HYBRID
2013
JANUS COMPLEMENTARY MEMS TRANSISTORS AND CIRCUITS
2013
REDUCING CONTACT RESISTANCE BY DIRECTED SELF-ASSEMBLING
2013
REPLACEMENT GATE SELF-ALIGNED CARBON NANOSTRUCTURE TRANSISTOR
2013
2013
USING FAST ANNEAL TO FORM UNIFORM NI(PT)SI(GE) CONTACTS ON SIGE LAYER
2012
DUAL SILICIDE PROCESS COMPATIBLE WITH A REPLACEMENT-METAL-GATE
2012
A METHOD TO FORM SILICIDE CONTACT IN TRENCHES
2012
STRUCTURE AND METHOD TO FORM UNIFORM AND STABLE SILICIDE
2012
INTERFACE ENGINEERING TO OPTIMIZE METAL-III-V CONTACTS
2012
METHOD TO FABRICATE MULTICRYSTAL SOLAR CELL WITH LIGHT TRAPPING SURFACE USING NANOPORE COPOLYMER
2012
NIOBIUM THIN FILM STRESS RELIEVING LAYER FOR THIN-FILM SOLAR CELLS
2012
USE BAND-EDGE GATE METALS AS THE CONTACTS TO THE SOURCE AND DRAIN OF CMOS DEVICES
2012
SCHOTTKY FET WITH ALL METAL GATE
2012
2012
SELF-ALIGNED BOTTOM PLATE FOR MHK MIM FOR EDRAM APPLICATIONS
2011
SILICIDE MICROMECHANICAL DEVICE AND METHODS TO FABRICATE SAME
2011
SCHOTTKY BARRIER SOLAR CELLS WITH HIGH AND LOW WORK FUNCTION METAL CONTACTS,
2011
STABILIZED NICKEL SILICIDE INTERCONNECTS
2011
2011
METAL-SEMICONDUCTOR INTERMIXED REGIONS
2011
DEPOSITION ON A NANOWIRE USING ATOMIC LAYER DEPOSITION
2011
2011
SOI SCHOTTKY SOURCE/DRAIN DEVICE STRUCTURE TO CONTROL ENCROACHMENT AND DELAMINATION OF SILICIDE
2010
SILICON ON INSULATOR FIELD EFFECT DEVICE
2010
A SCHOTTKY JUNCTION SI NANOWIRE/NANOBELT FIELD-EFFECT BIO-SENSOR/MOLECULE DETECTOR
2010
FET WITH FUSI GATE AND REDUCED SOURCE/DRAIN CONTACT RESISTANCE
2010
2010
IMPLANTLESS DOPANT SEGREGATION PROCESS FOR SILICIDE CONTACTS
2010
METHOD TO CONTROL METAL SEMICONDUCTOR MICRO-STRUCTURE
2010
2010
2010
CONTACT RESISTIVITY REDUCTION BY DEEP LEVEL IMPURITIES
2010
MULTIGATE STRUCTURE FORMED WITH ELECTROLESS METAL DEPOSITION
2010
INTERMIXED SILICIDE FOR REDUCTION OF EXTERNAL RESISTANCE IN INTEGRATED CIRCUIT DEVICES
2010
2010
SCHOTTKY FET FABRICATED WITH GATE LAST PROCESS
2010
METHOD TO REDUCE JUNCTION LEAKAGE
2010
2010
2010