Ngan Pham
Researcher at Department of Electrical Engineering; Solid-State Electronics
- Telephone:
- +46 18 471 58 34
- E-mail:
- ngan.pham@angstrom.uu.se
- Visiting address:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postal address:
- Box 65
751 03 UPPSALA
Researcher at Department of Materials Science and Engineering; Myfab Uppsala
- E-mail:
- ngan.pham@angstrom.uu.se
- Visiting address:
- Ångströmlaboratoriet, Regementsvägen 10
- Postal address:
- Box 35
751 03 UPPSALA
Short presentation
My research focuses on semiconductor process technology. We develop prototype devices with collaborators for healthcare, life science, and advanced computing. I am responsible for processes involving the electron beam lithography and dry etching at the Uppsala Microstructure Laboratory. I teach the course Process Technology of Semiconductor Devices, and part of the course Characterization Techniques for Semiconductor Materials.
