Thin Film Technology I
Syllabus, Master's level, 1TE016
- Education cycle
- Second cycle
- Main field(s) of study and in-depth level
- Chemistry A1F, Materials Engineering A1F, Physics A1F, Technology A1F
- Grading system
- Fail (U), Pass (3), Pass with credit (4), Pass with distinction (5)
- Finalised by
- The Faculty Board of Science and Technology, 26 March 2021
- Responsible department
- Department of Materials Science and Engineering
130 credits in science/engineering. Materials Analysis should have been attended. Proficiency in English equivalent to the Swedish upper secondary course English 6.
On completion of the course, the student should be able to:
- discuss the differences and similarities between different vacuum based deposition techniques,
- evaluate and use models for nucleating and growth of thin films,
- asses the relation between deposition technique, film structure, and film properties,
- discuss typical thin film applications,
- motivate selection of deposition techniques for various applications.
Deposition by various PVD techniques such as evaporation, sputtering, ion-plating as well as chemical coating methods (CVD and ALD). Plasma technologies for thin films. Fundamental physical and chemical processes. Effect of the substrate on the film growth and techniques for surface modification. Models for nucleation and film growth. Morphology and texture and their impact on material properties. Applications of thin film materials and deposition technologies.
Lectures, seminars and demonstrations.
Written examination (4 credits). Laboratory demonstrations (1 credit).
If there are special reasons for doing so, an examiner may make an exception from the method of assessment indicated and allow a student to be assessed by another method. An example of special reasons might be a certificate regarding special pedagogical support from the disability coordinator of the university.
- Reading list valid from Autumn 2023, version 2
- Reading list valid from Autumn 2023, version 1
- Reading list valid from Autumn 2022
- Reading list valid from Spring 2020
- Reading list valid from Autumn 2019
- Reading list valid from Spring 2016
- Reading list valid from Autumn 2013
- Reading list valid from Autumn 2011
- Reading list valid from Autumn 2010