Micro- and Nanotechnology I
5 credits
Reading list, Master's level, 1TE015
A revised version of the reading list is available.
Main group 1
- Hsu, Tai-Ran, MEMS and microsystems: design, manufacture, and nanoscale engineering, 2. ed., Hoboken, N.J., John Wiley, c2008
Syllabus
- Syllabus valid from Autumn 2025
- Syllabus valid from Autumn 2023, version 2
- Syllabus valid from Autumn 2023, version 1
- Syllabus valid from Autumn 2022
- Syllabus valid from Autumn 2021
- Syllabus valid from Autumn 2020
- Syllabus valid from Autumn 2019
- Syllabus valid from Autumn 2013
- Syllabus valid from Autumn 2012, version 2
- Syllabus valid from Autumn 2012, version 1
- Syllabus valid from Autumn 2010