Thin Film Technology I

5 credits

Syllabus, Master's level, 1TE016

Education cycle
Second cycle
Main field(s) of study and in-depth level
Chemistry A1F, Materials Engineering A1F, Physics A1F, Technology A1F
Grading system
Pass with distinction, Pass with credit, Pass, Fail
Finalised by
The Faculty Board of Science and Technology, 7 February 2023
Responsible department
Department of Materials Science and Engineering

Entry requirements

130 credits in science/engineering. Either Surface Characterisation and attended course in Surface and Materials Analysis, or attended course in Introduction to Materials Engineering and Surface Characterisation which can be taken in parallel. Proficiency in English equivalent to the Swedish upper secondary course English 6.

Learning outcomes

On completion of the course, the student should be able to:

  • discuss the differences and similarities between different vacuum based deposition techniques,
  • evaluate and use models for nucleating and growth of thin films,
  • asses the relation between deposition technique, film structure, and film properties,
  • discuss typical thin film applications,
  • motivate selection of deposition techniques for various applications.


Surface coatings is an important area in the manufacturing industry, where the properties of a material can be improved if the surface is modified. The course teaches thin film deposition by various PVD techniques such as evaporation, sputtering, ion-plating as well as chemical coating methods (CVD and ALD). Plasma technologies for thin films. Fundamental physical and chemical processes. Effect of the substrate on the film growth and techniques for surface modification. Models for nucleation and film growth. Morphology and texture and their impact on material properties. Applications of thin film materials and deposition technologies.


Lectures, seminars and laboratory demonstrations.


Written examination (4 credits). Laboratory demonstrations (1 credit).

If there are special reasons for doing so, an examiner may make an exception from the method of assessment indicated and allow a student to be assessed by another method. An example of special reasons might be a certificate regarding special pedagogical support from the disability coordinator of the university.