Micro- and Nanotechnology I

5 credits

Course, Master's level, 1TE015

Autumn 2023 Autumn 2023, Uppsala, 33%, On-campus, Swedish Only available as part of a programme

Autumn 2024 Autumn 2024, Uppsala, 33%, On-campus, Swedish

About the course

Scaling of phenomena and properties when dimensions decrease. Materials properties and function, especially on silicon. Basic manufacturing methods as lithography, deposition, wet and dry etching, and bonding, and important factors as selectivity, etching speed and yield. Properties and applications of microsensors and microactuators. Industrial and economic aspects.

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