Micro- and Nanotechnology I

5 credits

Course, Master's level, 1TE015

Expand the information below to show details on how to apply and entry requirements.

Autumn 2026 Autumn 2026, Uppsala, 33%, On-campus, Swedish

Location

Uppsala

Pace of study

33%

Teaching form

On-campus

Instructional time

Daytime

Study period

2 November 2026–17 January 2027

Language of instruction

Swedish

Entry requirements

120 credits in science/engineering. One of these alternatives: 1) Solid state physics F and attended course in Semiconductor Electronics, 2) Materials chemistry and attended course in Solid state physics I, 3) Introduction to materials engineering or Introduction to material science (10 credits). Proficiency in English equivalent to the Swedish upper secondary course English 6.

Selection

All qualified applicants will be admitted.

Fees

If you are not a citizen of a European Union (EU) or European Economic Area (EEA) country, or Switzerland, you are required to pay application and tuition fees.

First tuition fee instalment: SEK 13,750
Total tuition fee: SEK 13,750

Admitted or on the waiting list?

: Information on registration from the department

About the course

Scaling of phenomena and properties when dimensions decrease. Materials properties and function, especially on silicon. Basic manufacturing methods as lithography, deposition, wet and dry etching, and bonding, and important factors as selectivity, etching speed and yield. Properties and applications of microsensors and microactuators. Industrial and economic aspects.

Micro- and Nanotechnology I

Autumn 2026 Autumn 2026, Uppsala, 33%, On-campus, Swedish

Admitted or on the waiting list?

About the course

Syllabus

Reading list

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