Tomas Kubart
Universitetslektor vid Institutionen för elektroteknik; Fasta tillståndets elektronik
- Telefon:
- 018-471 72 57
- E-post:
- tomas.kubart@angstrom.uu.se
- Besöksadress:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postadress:
- Box 65
751 03 UPPSALA
- Akademiska meriter:
- Docent i teknisk fysik med inriktning mot elektronik
- ORCID:
- 0000-0003-2679-2387

Publikationer
Urval av publikationer
Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Ingår i Applied Physics Letters, 2018
- DOI för Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
- Ladda ner fulltext (pdf) av Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Ingår i Journal of Applied Physics, 2017
- DOI för Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
- Ladda ner fulltext (pdf) av Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
Ion induced stress relaxation in dense sputter-deposited DLC thin films
Ingår i Applied Physics Letters, 2017
Ingår i Solar Energy Materials and Solar Cells, s. 137-144, 2016
Ingår i Solar Energy Materials and Solar Cells, s. 757-764, 2016
Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015
Ingår i Thin Solid Films, s. 184-191, 2013
Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Ingår i Chemistry of Materials, s. 3162-3171, 2013
- DOI för Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
- Ladda ner fulltext (pdf) av Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Ingår i Journal of Applied Physics, s. 133302, 2013
Conformal Ni-silicide formation over three-dimensional device structures
Ingår i Applied Physics Letters, 2012
Senaste publikationer
Ingår i Journal of Materials Chemistry A, 2025
- DOI för Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
- Ladda ner fulltext (pdf) av Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
Pulsed plasma vapour deposition of carbon materials: Advantages and challenges
Ingår i Carbon, 2025
Ingår i Solar RRL, 2024
- DOI för Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se2 Solar Cell with 13.6% Efficiency Using In2O3:W as a Back Contact Material
- Ladda ner fulltext (pdf) av Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se2 Solar Cell with 13.6% Efficiency Using In2O3:W as a Back Contact Material
Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
Ingår i Advanced Energy Materials, 2024
- DOI för Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
- Ladda ner fulltext (pdf) av Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
Ingår i APPLIED CATALYSIS O: OPEN, 2024
- DOI för Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO2: Insights into amorphous and rutile activity
- Ladda ner fulltext (pdf) av Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO2: Insights into amorphous and rutile activity
Alla publikationer
Artiklar i tidskrift
Ingår i Journal of Materials Chemistry A, 2025
- DOI för Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
- Ladda ner fulltext (pdf) av Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
Pulsed plasma vapour deposition of carbon materials: Advantages and challenges
Ingår i Carbon, 2025
Ingår i Solar RRL, 2024
- DOI för Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se2 Solar Cell with 13.6% Efficiency Using In2O3:W as a Back Contact Material
- Ladda ner fulltext (pdf) av Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se2 Solar Cell with 13.6% Efficiency Using In2O3:W as a Back Contact Material
Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
Ingår i Advanced Energy Materials, 2024
- DOI för Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
- Ladda ner fulltext (pdf) av Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
Ingår i APPLIED CATALYSIS O: OPEN, 2024
- DOI för Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO2: Insights into amorphous and rutile activity
- Ladda ner fulltext (pdf) av Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO2: Insights into amorphous and rutile activity
A solid-state p–n tandem dye-sensitized solar cell
Ingår i Sustainable Energy & Fuels, s. 1004-1011, 2024
- DOI för A solid-state p–n tandem dye-sensitized solar cell
- Ladda ner fulltext (pdf) av A solid-state p–n tandem dye-sensitized solar cell
Ingår i Nature Communications, 2024
- DOI för Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting
- Ladda ner fulltext (pdf) av Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting
Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
Ingår i Surface & Coatings Technology, 2023
- DOI för Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
- Ladda ner fulltext (pdf) av Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
Ingår i ACS Applied Energy Materials, s. 6335-6343, 2022
- DOI för Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
- Ladda ner fulltext (pdf) av Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO2 sputter-coated PMMA films
Ingår i Applied Surface Science, 2022
Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
Ingår i Solar RRL, 2022
- DOI för Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
- Ladda ner fulltext (pdf) av Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
Ingår i ACS Applied Energy Materials, s. 12022-12028, 2022
- DOI för Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
- Ladda ner fulltext (pdf) av Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
Superconducting V3Si for quantum circuit applications
Ingår i Microelectronic Engineering, 2021
On the description of metal ion return in reactive high power impulse magnetron sputtering
Ingår i Surface & Coatings Technology, 2021
- DOI för On the description of metal ion return in reactive high power impulse magnetron sputtering
- Ladda ner fulltext (pdf) av On the description of metal ion return in reactive high power impulse magnetron sputtering
Influence of substrate-induced thermal stress on the superconducting properties of V3Si thin films
Ingår i Journal of Applied Physics, 2021
Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
Ingår i ACS Applied Energy Materials, s. 2762-2770, 2020
- DOI för Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
- Ladda ner fulltext (pdf) av Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
Ingår i Materials, 2020
- DOI för A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
- Ladda ner fulltext (pdf) av A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
Ingår i Coatings, 2020
- DOI för Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
- Ladda ner fulltext (pdf) av Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
Ingår i Coatings, 2020
- DOI för Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
- Ladda ner fulltext (pdf) av Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
Ingår i Surface & Coatings Technology, 2020
- DOI för Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
- Ladda ner fulltext (pdf) av Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
High power impulse magnetron sputtering of diamond-like carbon coatings
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2020
Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
Ingår i Physica Status Solidi (a) applications and materials science, 2019
- DOI för Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
- Ladda ner fulltext (pdf) av Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
Back and front contacts in kesterite solar cells: state-of-the-art and open questions
Ingår i Journal of Physics, 2019
- DOI för Back and front contacts in kesterite solar cells: state-of-the-art and open questions
- Ladda ner fulltext (pdf) av Back and front contacts in kesterite solar cells: state-of-the-art and open questions
Metal Filling by High Power Impulse Magnetron Sputtering
Ingår i Journal of Physics D, 2019
Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells
Ingår i The Journal of Physical Chemistry C, s. 26151-26160, 2019
Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells
Ingår i Chemical Communications, s. 3739-3742, 2018
Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
Ingår i Physical Chemistry, Chemical Physics - PCCP, s. 36-40, 2018
- DOI för Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
- Ladda ner fulltext (pdf) av Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
Ingår i Coatings, 2018
- DOI för Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
- Ladda ner fulltext (pdf) av Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering
Ingår i Surface & Coatings Technology, s. 92-98, 2018
Ingår i Journal of Physics D, 2018
Using hydrogen‐doped In2O3 films as a transparent back contact in (Ag,Cu)(In,Ga)Se2 solar cells
Ingår i Progress in Photovoltaics, s. 159-170, 2018
Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Ingår i Applied Physics Letters, 2018
- DOI för Improving the morphological stability of nickel germanide by tantalum and tungsten additions
- Ladda ner fulltext (pdf) av Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Ingår i Applied Physics Letters, 2018
- DOI för Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
- Ladda ner fulltext (pdf) av Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Bifacial Cu(In,Ga)Se2 solar cells using hydrogen‐doped In2O3 films as a transparent back contact
Ingår i Progress in Photovoltaics, s. 846-858, 2018
Ingår i Progress in Photovoltaics, s. 13-23, 2018
Ingår i Journal of Applied Physics, 2017
- DOI för Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
- Ladda ner fulltext (pdf) av Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
Ion induced stress relaxation in dense sputter-deposited DLC thin films
Ingår i Applied Physics Letters, 2017
Formation of nickel germanides from Ni layers with thickness below 10 nm
Ingår i Journal of Vacuum Science & Technology B, 2017
Ingår i Solar Energy Materials and Solar Cells, s. 137-144, 2016
Ingår i Solar Energy Materials and Solar Cells, s. 757-764, 2016
Ingår i The Journal of Physical Chemistry C, s. 16931-16945, 2016
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2016
E-MRS 2015 Symposium EE: Protective coatings and thin films Preface
Ingår i Surface & Coatings Technology, s. 1-1, 2016
Ingår i Thin Solid Films, s. 8-17, 2015
Ingår i Thin Solid Films, s. 77-88, 2015
Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium
Ingår i Thin Solid Films, s. 208-214, 2015
Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015
Ingår i Applied Surface Science, s. 161-169, 2015
Ingår i Applied Surface Science, s. 595-604, 2015
Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability
Ingår i Surface & Coatings Technology, s. 281-285, 2014
Ingår i Surface & Coatings Technology, s. 74-78, 2014
Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed onSi(100)
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2014
Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets
Ingår i Surface & Coatings Technology, s. 152-157, 2014
Ingår i Journal of Applied Physics, 2014
Mechanisms for compositional variations of coatings sputtered from a WS2 target
Ingår i Surface & Coatings Technology, s. 186-190, 2014
Influence of Ti addition on the structure and properties of low-friction W–S–C coatings
Ingår i Surface & Coatings Technology, s. 340-348, 2013
Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings
Ingår i Wear, s. 987-997, 2013
Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
Ingår i Thin Solid Films, s. 22-26, 2013
- DOI för Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
- Ladda ner fulltext (pdf) av Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells
Ingår i Progress in Photovoltaics, s. 10-17, 2013
Ingår i Surface & Coatings Technology, s. 714-719, 2013
Ingår i Thin Solid Films, s. 184-191, 2013
Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Ingår i Chemistry of Materials, s. 3162-3171, 2013
- DOI för Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
- Ladda ner fulltext (pdf) av Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Ingår i Journal of Applied Physics, s. 133302, 2013
Conformal Ni-silicide formation over three-dimensional device structures
Ingår i Applied Physics Letters, 2012
Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
Ingår i Thin Solid Films, s. 7093-7099, 2012
- DOI för Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
- Ladda ner fulltext (pdf) av Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
A Detrimental Reaction at the Molybdenum Back Contact in Cu2ZnSn(S,Se)4 Thin-Film Solar Cells
Ingår i Journal of the American Chemical Society, s. 19330-19333, 2012
Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
Ingår i Surface & Coatings Technology, s. 5055-5059, 2012
Ingår i Solar Energy Materials and Solar Cells, s. 110-117, 2012
Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Ingår i Electrochemical and solid-state letters, 2011
Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
Ingår i Surface & Coatings Technology, s. 1033-1036, 2011
Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing
Ingår i Chemistry of Materials, s. 4625-4633, 2011
Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides
Ingår i Thin Solid Films, s. 7779-7784, 2011
Ingår i Journal of Physics D, s. 345501, 2011
Studies of hysteresis effect in reactive HiPIMS deposition of oxides
Ingår i Surface & Coatings Technology, 2011
Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
Ingår i Surface & Coatings Technology, s. 4828-4831, 2011
Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Ingår i Electrochemical and solid-state letters, 2011
Reactive sputtering of SiO2–TiO2 thin film from composite Six/TiO2 targets
Ingår i Vacuum, s. 317-321, 2010
Modelling of sputtering yield amplification effect in reactive deposition of oxides
Ingår i Surface & Coatings Technology, s. 3882-3886, 2010
ERD analysis and modification of TiO2 thin films with heavy ions
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 1893-1898, 2010
Modelling of low energy ion sputtering from oxide surfaces
Ingår i Journal of Physics D, s. 205204, 2010
Localised modifications of anatase TiO2 thin films by a Focused Ion Beam
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 3142-3146, 2010
Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
Ingår i Thin Solid Films, s. 5548-5552, 2009
- DOI för Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
- Ladda ner fulltext (pdf) av Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
Implantation of anatase thin film with 100 keV 56Fe ions: Damage formation and magnetic behaviour
Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 2725-2730, 2009
Influence of the target composition on reactively sputtered titanium oxide films
Ingår i Vacuum, s. 1295-1298, 2009
A model of DC reactive magnetron sputtering for graded solar thermal absorbers
Ingår i Journal of Physics, Conference Series, 2008
Nanoscale colour control: W-O graded coatings deposited by magnetron sputtering
Ingår i Nanotechnology, s. 395202, 2008
High rate reactive magnetron sputter deposition of titanium oxide
Ingår i Applied Physics Letters, s. 221501, 2008
Experiments and modeling of dual reactive magnetron sputtering using two reactive gases
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 565-570, 2008
Direct current magnetron sputtering deposition of nanocomposite alumina – zirconia thin films
Ingår i Thin Solid Films, s. 8352-8358, 2008
Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
Ingår i Plasma Processes and Polymers, 2007
Ingår i Appl Phys Lett, 2006
Dynamic behaviour of the reactive sputtering process
Ingår i Thin Solid Films, s. 421-424, 2006
Kapitel i böcker, delar av antologi
Reactive high power impulse magnetron sputtering
Ingår i High Power Impulse Magnetron Sputtering, s. 223-263, Elsevier, 2020
Ingår i Copper zinc tin sulfide-based thin film solar cells, s. 203-220, John Wiley & Sons, 2015
Konferensbidrag
CoCrFeMnNi High-Entropy Alloys for Lithium-Mediated Electrochemical Nitrogen Reduction
2023
Flipping the physics classroom – First observations
2021
Organs-on-Chip System with Integrated Transparent Conductive Oxide Electrodes
2018
Scalability Study of Nickel Germanides
2016
Magnetron sputtering of InGaZnO and ZnSnO amorphous oxide semiconductors
Ingår i E-MRS Spring meeting 2015, May 11-15, Lille, France, 2015
Ingår i Abstracts, 2015
Industrial Scale Deposition of Diamond-like Carbon Thin Films using Ne-based HiPIMS Discharge
2015
Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015
Metallization of nanostructures by High Power Impulse Magnetron Sputtering
Ingår i 4 th Magnetron, Ion processing & Arc Technologies European Conference, Paris, 8-11 December 2015, 2015
2014
Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium
2014
Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study
Ingår i 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014
Dynamics of the sputtering target surface evolution in reactive HiPIMS
Ingår i Invited talk, 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014
Measurement of Ionized Metal Flux Fraction in HiPIMS by Retarding Field QCM Analyzer
Ingår i 41st International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 - May 2, 2014, 2014
Reactive HiPIMS of Oxides: Hysteresis and Discharge behaviour
Ingår i Invited talk, 42th International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 -May 2, 2014, 2014
Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings
Ingår i 19th International Conference on Wear of Materials 2013; 14-18 April 2013; Portland, OR, USA, 2013
Reactive magnetron sputtering: from fundamentals to high deposition rate processes
Ingår i Proceedings of the Twelfth th International Symposium on Sputtering & Plasma Processes ISSP 2013, s. 5-9, 2013
Investigation of ionized metal flux fraction in HiPIMS discharge with Ti and Ni target
2013
Mechanisms responsible for compositional variations of films sputtered from a WS2 target
Ingår i International Conference on Metallurgical Coatings and Thin films (ICMCTF) 23-27/04 2012, San Diego, abstract number:428, 2012
s. 9, 2012
Reactive sputtering of Fe2O3 thin films by high power pulsed plasma systems
2012
Modelling of reactive magnetron sputtering: Towards comprehensive model
2012
Reactive magnetron sputtering of precursors for CZTS solar cells
2012
2012
High rate reactive magnetron sputtering of oxides using sputtering yield amplification
2012
Quaternary W-S-C-Ti films for tribological applications
2011
Sputter Yield Amplification of reactively sputtered TiO2
2011
Hysteresis effect in reactive high power impulse magnetron sputtering of metal oxides
2011
Serial magnetron co-sputtering: Sputtering yield amplification and process modelling
Ingår i E-MRS 2011 Spring Meeting, 2011
Modelling of target effects in reactive HIPIMS
Ingår i 2nd Internation Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011
Synthesis of c-tilted AlN films with a good tilt and thickness uniformity
Ingår i Proceedings of IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 1238-1241, 2011
Ion irradiation-induced modification of TiO2 thin films
Ingår i E-MRS 2011 Spring Meeting, 2011
Implantation and surface modification of TiO2 by a Focused Ion Beam
Ingår i E-MRS 2011 Spring Meeting, 2011
Ingår i 2nd International Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011
Molecular dynamics simulations of low energy Ar sputtering of TiO2 surfaces
2010
Studies of hysteresis effect in reactive HiPIMS deposition of oxides
2010
Studies of TiN films deposited by HIPIMS at different substrate temperatures and substrate bias
2010
Sputtering Yield Amplification in Reactive Serial Co-Sputtering
2010
Sputtering yield amplification in reactive sputtering
2010
Studies and Modelling of Surface Modifications of Different Oxides During Ion Bombardmen
Ingår i Presented at the 7th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2009), Busan, South Korea, September 20-25, 2009, 2009
Decorative Oxide Coatings: Colour Control by Compositional Gradient
Ingår i E-MRS 2009, Spring Meeting in Strasbourgh, France, June 8-12, 2009, 2009
Ingår i Presented at the International Symposium on Reactive Sputter Deposition (RSD2009), Manchester, United Kingdom, December 10-11, 2009, 2009
2009
Magnetic behaviour of Fe implanted TiO2 thin films
Ingår i Book of Abstracts, 2008
Damage formation in TiO2 by heavy ions: consequences for micro- and nano-struring
Ingår i 7th International Symposium on Swift Heavy Ions in Matter (SHIM2008), 2008
A model of DC reactive magnetron sputtering for graded solar thermal absorbers
2007
On the high rate reactive sputtering of substoichiometric titanium oxide targets
2007
Experiments and modelling of reactive sputtering using two reactive gases and two targets
2007
Dynamic Modelling of Reactive Magnetron Sputtering
2006
Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
2006
State of the art in Reactive Magnetron Sputtering
Ingår i Invited to The third Mikkeli International Industrial Coating Seminar, MIICS 2006, Mikkeli, Finland, March 16-18, 2006 and Conference Proceedings, 2006
Advanced Process Modelling of the Rotating Magnetron
2006
Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets
Ingår i Proceedings of Society of Vacuum Coaters, s. 324.328, 2004