Tomas Kubart

Highly conductive ultrathin Co films by high-power impulse magnetron sputtering

Jablonka, Lukas; Riekehr, Lars; Zhang, Zhen; Zhang, Shi-Li et al.

Ingår i Applied Physics Letters, 2018

• DOI för Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
• Ladda ner fulltext (pdf) av Highly conductive ultrathin Co films by high-power impulse magnetron sputtering

Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

Kubart, Tomas; Aijaz, Asim

Ingår i Journal of Applied Physics, 2017

• DOI för Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
• Ladda ner fulltext (pdf) av Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

Ion induced stress relaxation in dense sputter-deposited DLC thin films

Aijaz, Asim; Kubart, Tomas

Ingår i Applied Physics Letters, 2017

• DOI för Ion induced stress relaxation in dense sputter-deposited DLC thin films

Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Aijaz, Asim; Ji, Yu-Xia; Montero, Jose; Niklasson, Gunnar A. et al.

Ingår i Solar Energy Materials and Solar Cells, s. 137-144, 2016

• DOI för Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells

Keller, Jan; Aijaz, Asim; Gustavsson, Fredrik; Kubart, Tomas et al.

Ingår i Solar Energy Materials and Solar Cells, s. 757-764, 2016

• DOI för Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells

Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering

Kubart, Tomas; Törndahl, Tobias; Moreira, Milena; Katardjiev, Ilia

Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015

Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

Aiempanakit, Montri; Aijaz, Asim; Lundin, Daniel; Helmersson, Ulf et al.

Ingår i Journal of Applied Physics, s. 133302, 2013

• DOI för Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

Effects of Back Contact Instability on Cu₂ZnSnS₄ Devices and Processes

Scragg, Jonathan J.; Kubart, Tomas; Wätjen, Timo; Ericson, Tove et al.

Ingår i Chemistry of Materials, s. 3162-3171, 2013

• DOI för Effects of Back Contact Instability on Cu₂ZnSnS₄ Devices and Processes
• Ladda ner fulltext (pdf) av Effects of Back Contact Instability on Cu₂ZnSnS₄ Devices and Processes

Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

Hubicka, Z.; Kment, S.; Olejnicek, J.; Cada, M. et al.

Ingår i Thin Solid Films, s. 184-191, 2013

• DOI för Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

Conformal Ni-silicide formation over three-dimensional device structures

Zhu, Zhiwei; Gao, Xindong; Kubart, Tomas; Zhang, Zhi-Bin et al.

Ingår i Applied Physics Letters, 2012

• DOI för Conformal Ni-silicide formation over three-dimensional device structures

Crystallization kinetics of TiO₂ thin films: a comparative study of film deposition conditions

Fernandes, Daniel Filipe Félix; Hernández, Jaime J.; Kim, Seohan; Martín–Asensio, Alberto et al.

Ingår i Thin Solid Films, 2026

• DOI för Crystallization kinetics of TiO₂ thin films: a comparative study of film deposition conditions

On the energy input in the reactive HiPIMS deposition of TiO₂

Fernandes, Daniel Filipe Félix; Kubart, Tomas

2025

Thermodynamic insights into the Ba–S system for the formation of BaZrS₃ perovskites and other Ba sulfides

Comparotto, Corrado; Whalley, Lucy; Sopiha, Kostiantyn; Frost, Robert J. W. et al.

Ingår i Journal of Materials Chemistry A, s. 9983-9991, 2025

• DOI för Thermodynamic insights into the Ba–S system for the formation of BaZrS₃ perovskites and other Ba sulfides
• Ladda ner fulltext (pdf) av Thermodynamic insights into the Ba–S system for the formation of BaZrS₃ perovskites and other Ba sulfides

Ion-assisted sputter-deposition of superconducting NbN thin films on silicon

Košutová, Tereza; Yao, Yao; Fernandes, Daniel; Zhang, Zhen et al.

Ingår i Superconductors Science and Technology, 2025

• DOI för Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
• Ladda ner fulltext (pdf) av Ion-assisted sputter-deposition of superconducting NbN thin films on silicon

Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells

Rao, Smita G.; Yao, Yao; Törne, Karin; Molmen, Live et al.

Ingår i Electrochimica Acta, 2025

• DOI för Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
• Ladda ner fulltext (pdf) av Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells

Crystallization kinetics of TiO₂ thin films: a comparative study of film deposition conditions

Fernandes, Daniel Filipe Félix; Hernández, Jaime J.; Kim, Seohan; Martín–Asensio, Alberto et al.

Ingår i Thin Solid Films, 2026

• DOI för Crystallization kinetics of TiO₂ thin films: a comparative study of film deposition conditions

Thermodynamic insights into the Ba–S system for the formation of BaZrS₃ perovskites and other Ba sulfides

Comparotto, Corrado; Whalley, Lucy; Sopiha, Kostiantyn; Frost, Robert J. W. et al.

Ingår i Journal of Materials Chemistry A, s. 9983-9991, 2025

• DOI för Thermodynamic insights into the Ba–S system for the formation of BaZrS₃ perovskites and other Ba sulfides
• Ladda ner fulltext (pdf) av Thermodynamic insights into the Ba–S system for the formation of BaZrS₃ perovskites and other Ba sulfides

Ion-assisted sputter-deposition of superconducting NbN thin films on silicon

Košutová, Tereza; Yao, Yao; Fernandes, Daniel; Zhang, Zhen et al.

Ingår i Superconductors Science and Technology, 2025

• DOI för Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
• Ladda ner fulltext (pdf) av Ion-assisted sputter-deposition of superconducting NbN thin films on silicon

Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells

Rao, Smita G.; Yao, Yao; Törne, Karin; Molmen, Live et al.

Ingår i Electrochimica Acta, 2025

• DOI för Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
• Ladda ner fulltext (pdf) av Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells

Pulsed plasma vapour deposition of carbon materials: Advantages and challenges

Corbella, Carles; Aijaz, Asim; Kubart, Tomas; Lin, Li et al.

Ingår i Carbon, 2025

• DOI för Pulsed plasma vapour deposition of carbon materials: Advantages and challenges

Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO₂: Insights into amorphous and rutile activity

Silveira, Vitor; Fernandes, Daniel Filipe Félix; Bericat Vadell, Robert; Edvinsson, Tomas et al.

Ingår i APPLIED CATALYSIS O: OPEN, 2024

• DOI för Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO₂: Insights into amorphous and rutile activity
• Ladda ner fulltext (pdf) av Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO₂: Insights into amorphous and rutile activity

Self-aligned formation of superconducting sub-5 nm PtSi films

Yao, Yao; Fernandes, Daniel Filipe Félix; Košutová, Tereza; Kubart, Tomas et al.

Ingår i APL Quantum, 2024

• DOI för Self-aligned formation of superconducting sub-5 nm PtSi films

Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se₂ Solar Cell with 13.6% Efficiency Using In₂O₃:W as a Back Contact Material

Keller, Jan; Stolt, Lars; Donzel-Gargand, Olivier; Violas, André F. et al.

Ingår i Solar RRL, 2024

• DOI för Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se₂ Solar Cell with 13.6% Efficiency Using In₂O₃:W as a Back Contact Material
• Ladda ner fulltext (pdf) av Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se₂ Solar Cell with 13.6% Efficiency Using In₂O₃:W as a Back Contact Material

Reactive DC Sputtered TiO₂ Electron Transport Layers for Cadmium-Free Sb₂Se₃ Solar Cells

Don, Christopher H.; Shalvey, Thomas P.; Sindi, Daniya A.; Lewis, Bradley et al.

Ingår i Advanced Energy Materials, 2024

• DOI för Reactive DC Sputtered TiO₂ Electron Transport Layers for Cadmium-Free Sb₂Se₃ Solar Cells
• Ladda ner fulltext (pdf) av Reactive DC Sputtered TiO₂ Electron Transport Layers for Cadmium-Free Sb₂Se₃ Solar Cells

A solid-state p–n tandem dye-sensitized solar cell

Wrede, Sina; Cai, Bin; Cheng, Fangwen; Johansson, Malin B. et al.

Ingår i Sustainable Energy & Fuels, s. 1004-1011, 2024

• DOI för A solid-state p–n tandem dye-sensitized solar cell
• Ladda ner fulltext (pdf) av A solid-state p–n tandem dye-sensitized solar cell

Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting

Cheng, Fangwen; Pavliuk, Olha; Hardt, Steffen; Hunt, Leigh Anna et al.

Ingår i Nature Communications, 2024

• DOI för Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting
• Ladda ner fulltext (pdf) av Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting

Photocatalytic activity of TiO₂ deposited by reactive HiPIMS with long target-to-substrate distance

Fernandes, Daniel Filipe Félix; Österlund, Lars; Kubart, Tomas

Ingår i Surface & Coatings Technology, 2023

• DOI för Photocatalytic activity of TiO₂ deposited by reactive HiPIMS with long target-to-substrate distance
• Ladda ner fulltext (pdf) av Photocatalytic activity of TiO₂ deposited by reactive HiPIMS with long target-to-substrate distance

Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO₂ sputter-coated PMMA films

Jacobo-Martin, Alejandra; Hernandez, Jaime J.; Solano, Eduardo; Monclus, Miguel A. et al.

Ingår i Applied Surface Science, 2022

• DOI för Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO₂ sputter-coated PMMA films

Synthesis of BaZrS₃ Perovskite Thin Films at a Moderate Temperature on Conductive Substrates

Comparotto, Corrado; Ström, Petter; Donzel-Gargand, Olivier; Kubart, Tomas et al.

Ingår i ACS Applied Energy Materials, s. 6335-6343, 2022

• DOI för Synthesis of BaZrS₃ Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
• Ladda ner fulltext (pdf) av Synthesis of BaZrS₃ Perovskite Thin Films at a Moderate Temperature on Conductive Substrates

Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts

Keller, Jan; Stolt, Lars; Donzel-Gargand, Olivier; Kubart, Tomas et al.

Ingår i Solar RRL, 2022

• DOI för Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
• Ladda ner fulltext (pdf) av Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts

Atomic Layer Deposition of SnO₂ as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells

Cheng, Haoliang; Liu, Yawen; Cai, Bin; Hägglund, Carl et al.

Ingår i ACS Applied Energy Materials, s. 12022-12028, 2022

• DOI för Atomic Layer Deposition of SnO₂ as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
• Ladda ner fulltext (pdf) av Atomic Layer Deposition of SnO₂ as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells

Superconducting V3Si for quantum circuit applications

Vethaak, T. D.; Gustavo, F.; Farjot, T.; Kubart, Tomas et al.

Ingår i Microelectronic Engineering, 2021

• DOI för Superconducting V3Si for quantum circuit applications

On the description of metal ion return in reactive high power impulse magnetron sputtering

Kubart, Tomas; Fernandes, Daniel Filipe Félix; Nyberg, Tomas

Ingår i Surface & Coatings Technology, 2021

• DOI för On the description of metal ion return in reactive high power impulse magnetron sputtering
• Ladda ner fulltext (pdf) av On the description of metal ion return in reactive high power impulse magnetron sputtering

Influence of substrate-induced thermal stress on the superconducting properties of V3Si thin films

Vethaak, T. D.; Gustavo, F.; Farjot, T.; Kubart, Tomas et al.

Ingår i Journal of Applied Physics, 2021

• DOI för Influence of substrate-induced thermal stress on the superconducting properties of V3Si thin films

Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing

Comparotto, Corrado; Davydova, Alexandra; Ericson, Tove; Riekehr, Lars et al.

Ingår i ACS Applied Energy Materials, s. 2762-2770, 2020

• DOI för Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
• Ladda ner fulltext (pdf) av Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing

A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

Vitelaru, Catalin; Parau, Anca Constantina; Constantin, Lidia Ruxandra; Kiss, Adrian Emil et al.

Ingår i Materials, 2020

• DOI för A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
• Ladda ner fulltext (pdf) av A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics

Prusakova, Lucie; Hubik, Pavel; Aijaz, Asim; Nyberg, Tomas et al.

Ingår i Coatings, 2020

• DOI för Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
• Ladda ner fulltext (pdf) av Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics

Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas

Oliveira, Joao; Ferreira, Fabio; Serra, Ricardo; Kubart, Tomas et al.

Ingår i Coatings, 2020

• DOI för Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
• Ladda ner fulltext (pdf) av Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas

Tailoring residual stresses in CrN_x films on alumina and silicon deposited by high-power impulse magnetron sputtering

Elo, Robin; Jacobson, Staffan; Kubart, Tomas

Ingår i Surface & Coatings Technology, 2020

• DOI för Tailoring residual stresses in CrN_x films on alumina and silicon deposited by high-power impulse magnetron sputtering
• Ladda ner fulltext (pdf) av Tailoring residual stresses in CrN_x films on alumina and silicon deposited by high-power impulse magnetron sputtering

High power impulse magnetron sputtering of diamond-like carbon coatings

Kubart, Tomas; Aijaz, Asim; Andersson, Joakim; Ferreira, Fabio et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2020

• DOI för High power impulse magnetron sputtering of diamond-like carbon coatings

Antimony-Doped Tin Oxide as Transparent Back Contact in Cu₂ZnSnS₄ Thin-Film Solar Cells

Englund, Sven; Kubart, Tomas; Keller, Jan; Moro, Marcos V. et al.

Ingår i Physica Status Solidi (A), 2019

• DOI för Antimony-Doped Tin Oxide as Transparent Back Contact in Cu₂ZnSnS₄ Thin-Film Solar Cells
• Ladda ner fulltext (pdf) av Antimony-Doped Tin Oxide as Transparent Back Contact in Cu₂ZnSnS₄ Thin-Film Solar Cells

Back and front contacts in kesterite solar cells: state-of-the-art and open questions

Platzer Björkman, Charlotte; Barreau, Nicolas; Bär, Marcus; Choubrac, Leo et al.

Ingår i Journal of Physics, 2019

• DOI för Back and front contacts in kesterite solar cells: state-of-the-art and open questions
• Ladda ner fulltext (pdf) av Back and front contacts in kesterite solar cells: state-of-the-art and open questions

Metal Filling by High Power Impulse Magnetron Sputtering

Jablonka, Lukas; Moskovkin, Pavel; Zhang, Zhen; Zhang, Shi-Li et al.

Ingår i Journal of Physics D, 2019

• DOI för Metal Filling by High Power Impulse Magnetron Sputtering

Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells

Tian, Lei; Törndahl, Tobias; Ling, Junzhong; Pati, Palas Baran et al.

Ingår i The Journal of Physical Chemistry C, s. 26151-26160, 2019

• DOI för Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells

Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells

Tian, Lei; Föhlinger, Jens; Zhang, Zhi-Bin; Pati, Palas Baran et al.

Ingår i Chemical Communications, s. 3739-3742, 2018

• DOI för Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells

Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film

Tian, Lei; Föhlinger, Jens; Pati, Palas Baran; Zhang, Zhi-Bin et al.

Ingår i Physical Chemistry, Chemical Physics - PCCP, s. 36-40, 2018

• DOI för Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
• Ladda ner fulltext (pdf) av Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film

Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne

Aijaz, Asim; Ferreira, Fabio; Oliveira, Joao; Kubart, Tomas

Ingår i Coatings, 2018

• DOI för Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
• Ladda ner fulltext (pdf) av Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne

Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering

Ferreira, Fabio; Aijaz, Asim; Kubart, Tomas; Cavaleiro, Albano et al.

Ingår i Surface & Coatings Technology, s. 92-98, 2018

• DOI för Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering

Discharge runaway in high power impulse magnetron sputtering of carbon: the effect of gas pressure, composition and target peak voltage

Vitelaru, Catalin; Aijaz, Asim; Parau, Anca Constantina; Kiss, Adrian Emil et al.

Ingår i Journal of Physics D, 2018

• DOI för Discharge runaway in high power impulse magnetron sputtering of carbon: the effect of gas pressure, composition and target peak voltage

Using hydrogen‐doped In₂O₃ films as a transparent back contact in (Ag,Cu)(In,Ga)Se₂ solar cells

Keller, Jan; Shariati, Masumeh-Nina; Aijaz, Asim; Riekehr, Lars et al.

Ingår i Progress in Photovoltaics, s. 159-170, 2018

• DOI för Using hydrogen‐doped In₂O₃ films as a transparent back contact in (Ag,Cu)(In,Ga)Se₂ solar cells

Improving the morphological stability of nickel germanide by tantalum and tungsten additions

Jablonka, Lukas; Kubart, Tomas; Gustavsson, Fredrik; Descoins, Marion et al.

Ingår i Applied Physics Letters, 2018

• DOI för Improving the morphological stability of nickel germanide by tantalum and tungsten additions
• Ladda ner fulltext (pdf) av Improving the morphological stability of nickel germanide by tantalum and tungsten additions

Highly conductive ultrathin Co films by high-power impulse magnetron sputtering

Jablonka, Lukas; Riekehr, Lars; Zhang, Zhen; Zhang, Shi-Li et al.

Ingår i Applied Physics Letters, 2018

• DOI för Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
• Ladda ner fulltext (pdf) av Highly conductive ultrathin Co films by high-power impulse magnetron sputtering

Bifacial Cu(In,Ga)Se₂ solar cells using hydrogen‐doped In₂O₃ films as a transparent back contact

Keller, Jan; Chen, Wei-Chao; Riekehr, Lars; Kubart, Tomas et al.

Ingår i Progress in Photovoltaics, s. 846-858, 2018

• DOI för Bifacial Cu(In,Ga)Se₂ solar cells using hydrogen‐doped In₂O₃ films as a transparent back contact

Effect of KF absorber treatment on the functionality of different transparent conductive oxide layers in CIGSe solar cells

Keller, Jan; Chalvet, Francis; Joel, Jonathan; Aijaz, Asim et al.

Ingår i Progress in Photovoltaics, s. 13-23, 2018

• DOI för Effect of KF absorber treatment on the functionality of different transparent conductive oxide layers in CIGSe solar cells

Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

Kubart, Tomas; Aijaz, Asim

Ingår i Journal of Applied Physics, 2017

• DOI för Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
• Ladda ner fulltext (pdf) av Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering

Ion induced stress relaxation in dense sputter-deposited DLC thin films

Aijaz, Asim; Kubart, Tomas

Ingår i Applied Physics Letters, 2017

• DOI för Ion induced stress relaxation in dense sputter-deposited DLC thin films

Formation of nickel germanides from Ni layers with thickness below 10 nm

Jablonka, Lukas; Kubart, Tomas; Primetzhofer, Daniel; Abedin, Ahmad et al.

Ingår i Journal of Vacuum Science & Technology B, 2017

• DOI för Formation of nickel germanides from Ni layers with thickness below 10 nm

Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Aijaz, Asim; Ji, Yu-Xia; Montero, Jose; Niklasson, Gunnar A. et al.

Ingår i Solar Energy Materials and Solar Cells, s. 137-144, 2016

• DOI för Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells

Keller, Jan; Aijaz, Asim; Gustavsson, Fredrik; Kubart, Tomas et al.

Ingår i Solar Energy Materials and Solar Cells, s. 757-764, 2016

• DOI för Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1-xGaxSe2 thin film solar cells

Broadband Optical Absorption Caused by the Plasmonic Response of Coalesced Au Nanoparticles Embedded in a TiO2 Matrix

Borges, J.; Pereira, R. M. S.; Rodrigues, M. S.; Kubart, Tomas et al.

Ingår i The Journal of Physical Chemistry C, s. 16931-16945, 2016

• DOI för Broadband Optical Absorption Caused by the Plasmonic Response of Coalesced Au Nanoparticles Embedded in a TiO2 Matrix

Synthesis of hydrogenated diamondlike carbon thin films using neon-acetylene based high power impulse magnetron sputtering discharges

Aijaz, Asim; Louring, Sascha; Lundin, Daniel; Kubart, Tomas et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2016

• DOI för Synthesis of hydrogenated diamondlike carbon thin films using neon-acetylene based high power impulse magnetron sputtering discharges

E-MRS 2015 Symposium EE: Protective coatings and thin films Preface

Pierson, Jean-Francois; Cekada, Miha; Kubart, Tomas; Sanjines, Rosendo

Ingår i Surface & Coatings Technology, s. 1-1, 2016

• DOI för E-MRS 2015 Symposium EE: Protective coatings and thin films Preface

Microstructural evolution of Au/TiO2 nanocomposite films: The influence of Au concentration and thermal annealing

Borges, J.; Kubart, Tomas; Kumar, S.; Leifer, Klaus et al.

Ingår i Thin Solid Films, s. 77-88, 2015

• DOI för Microstructural evolution of Au/TiO2 nanocomposite films: The influence of Au concentration and thermal annealing

Thin films composed of gold nanoparticles dispersed in a dielectric matrix: The influence of the host matrix on the optical and mechanical responses

Borges, J.; Rodrigues, M. S.; Kubart, Tomas; Kumar, S. et al.

Ingår i Thin Solid Films, s. 8-17, 2015

• DOI för Thin films composed of gold nanoparticles dispersed in a dielectric matrix: The influence of the host matrix on the optical and mechanical responses

Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium

Ren, Yi; Scragg, Jonathan J.; Ericson, Tove; Kubart, Tomas et al.

Ingår i Thin Solid Films, s. 208-214, 2015

• DOI för Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium

Large-area homogeneous periodic surface structures generated on the surface sputtered boron carbide thin films by femtosecond laser processing

Serra, R.; Oliveira, V.; Oliveira, J. C.; Kubart, Tomas et al.

Ingår i Applied Surface Science, s. 161-169, 2015

• DOI för Large-area homogeneous periodic surface structures generated on the surface sputtered boron carbide thin films by femtosecond laser processing

Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering

Moreira, Milena A.; Törndahl, Tobias; Katardjiev, Ilia; Kubart, Tomas

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015

• DOI för Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering

Thin films composed of Ag nanoclusters dispersed in TiO2: Influence of composition and thermal annealing on the microstructure and physical responses

Borges, J.; Rodrigues, M. S.; Lopes, C.; Costa, D. et al.

Ingår i Applied Surface Science, s. 595-604, 2015

• DOI för Thin films composed of Ag nanoclusters dispersed in TiO2: Influence of composition and thermal annealing on the microstructure and physical responses

Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability

Kubart, Tomas; Ericson, Tove; Scragg, Jonathan J.; Edoff, Marika et al.

Ingår i Surface & Coatings Technology, s. 281-285, 2014

• DOI för Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability

Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed onSi(100)

Xu, Peng; Kubart, Tomas; Gao, Xindong; Wu, Dongping et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2014

• DOI för Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed onSi(100)

Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

Kubart, Tomas; Cada, Martin; Lundin, Daniel; Hubicka, Zdenek

Ingår i Surface & Coatings Technology, s. 152-157, 2014

• DOI för Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

Optical properties and refractive index sensitivity of reactive sputtered oxide coatings with embedded Au clusters

Figueiredo, Nuno M.; Kubart, Tomas; Sanchez-Garcia, J. A.; Escobar Galindo, R. et al.

Ingår i Journal of Applied Physics, 2014

• DOI för Optical properties and refractive index sensitivity of reactive sputtered oxide coatings with embedded Au clusters

Mechanisms for compositional variations of coatings sputtered from a WS2 target

Särhammar, Erik; Strandberg, Erik; Sundberg, Jill; Nyberg, Harald et al.

Ingår i Surface & Coatings Technology, s. 186-190, 2014

• DOI för Mechanisms for compositional variations of coatings sputtered from a WS2 target

Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering

Schmidt, Ruediger M.; Ries, Patrick; Pflug, Andreas; Wuttig, Matthias et al.

Ingår i Surface & Coatings Technology, s. 74-78, 2014

• DOI för Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering

Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings

Nyberg, Harald; Sundberg, Jill; Särhammar, Erik; Gustavsson, Fredrik et al.

Ingår i Wear, s. 987-997, 2013

• DOI för Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings

Influence of Ti addition on the structure and properties of low-friction W–S–C coatings

Sundberg, Jill; Nyberg, Harald; Särhammar, Erik; Gustavsson, Fredrik et al.

Ingår i Surface & Coatings Technology, s. 340-348, 2013

• DOI för Influence of Ti addition on the structure and properties of low-friction W–S–C coatings

Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells

Scragg, Jonathan; Ericson, Tove; Fontané, Xavier; Izquierdo-Roca, Victor et al.

Ingår i Progress in Photovoltaics, s. 10-17, 2013

• DOI för Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells

Annealing behavior of reactively sputtered precursor films for Cu₂ZnSnS₄ solar cells

Ericson, Tove; Scragg, Jonathan J.; Kubart, Tomas; Törndahl, Tobias et al.

Ingår i Thin Solid Films, s. 22-26, 2013

• DOI för Annealing behavior of reactively sputtered precursor films for Cu₂ZnSnS₄ solar cells
• Ladda ner fulltext (pdf) av Annealing behavior of reactively sputtered precursor films for Cu₂ZnSnS₄ solar cells

Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

Aiempanakit, Montri; Aijaz, Asim; Lundin, Daniel; Helmersson, Ulf et al.

Ingår i Journal of Applied Physics, s. 133302, 2013

• DOI för Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

Effects of Back Contact Instability on Cu₂ZnSnS₄ Devices and Processes

Scragg, Jonathan J.; Kubart, Tomas; Wätjen, Timo; Ericson, Tove et al.

Ingår i Chemistry of Materials, s. 3162-3171, 2013

• DOI för Effects of Back Contact Instability on Cu₂ZnSnS₄ Devices and Processes
• Ladda ner fulltext (pdf) av Effects of Back Contact Instability on Cu₂ZnSnS₄ Devices and Processes

Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

Hubicka, Z.; Kment, S.; Olejnicek, J.; Cada, M. et al.

Ingår i Thin Solid Films, s. 184-191, 2013

• DOI för Deposition of hematite Fe2O3 thin film by DC pulsed magnetron and DC pulsed hollow cathode sputtering system

HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis

Surpi, Alessandro; Kubart, Tomas; Giordani, Diego; Tosello, Martino et al.

Ingår i Surface & Coatings Technology, s. 714-719, 2013

• DOI för HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis

Conformal Ni-silicide formation over three-dimensional device structures

Zhu, Zhiwei; Gao, Xindong; Kubart, Tomas; Zhang, Zhi-Bin et al.

Ingår i Applied Physics Letters, 2012

• DOI för Conformal Ni-silicide formation over three-dimensional device structures

Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells

Ericson, Tove; Kubart, Tomas; Scragg, Jonathan J.; Platzer-Björkman, Charlotte

Ingår i Thin Solid Films, s. 7093-7099, 2012

• DOI för Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
• Ladda ner fulltext (pdf) av Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells

Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering

Kubart, Tomas; Schmidt, R. M.; Austgen, M.; Nyberg, Tomas et al.

Ingår i Surface & Coatings Technology, s. 5055-5059, 2012

• DOI för Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering

A Detrimental Reaction at the Molybdenum Back Contact in Cu₂ZnSn(S,Se)₄ Thin-Film Solar Cells

Scragg, Jonathan; Wätjen, Timo; Edoff, Marika; Ericson, Tove et al.

Ingår i Journal of the American Chemical Society, s. 19330-19333, 2012

• DOI för A Detrimental Reaction at the Molybdenum Back Contact in Cu₂ZnSn(S,Se)₄ Thin-Film Solar Cells

Influence of precursor sulfur content on film formation and compositional changes in Cu2ZnSnS4 films and solar cells

Platzer-Björkman, Charlotte; Scragg, Jonathan; Flammersberger, H; Kubart, Tomas et al.

Ingår i Solar Energy Materials and Solar Cells, s. 110-117, 2012

• DOI för Influence of precursor sulfur content on film formation and compositional changes in Cu2ZnSnS4 films and solar cells

Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness

Gao, Xindong; Andersson, Joakim; Kubart, Tomas; Nyberg, Tomas et al.

Ingår i Electrochemical and solid-state letters, 2011

• DOI för Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness

Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

Aiempanakit, Montri; Helmersson, Ulf; Aijaz, Asim; Larsson, Petter et al.

Ingår i Surface & Coatings Technology, s. 4828-4831, 2011

• DOI för Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films

Liljeholm, Lina; Junaid, M.; Kubart, Tomas; Birch, J. et al.

Ingår i Surface & Coatings Technology, s. 1033-1036, 2011

• DOI för Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films

Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing

Scragg, Jonathan J.; Ericson, Tove; Kubart, Tomas; Edoff, Marika et al.

Ingår i Chemistry of Materials, s. 4625-4633, 2011

• DOI för Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing

Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides

Aiempanakit, Montri; Kubart, Tomas; Larsson, Petter; Sarakinos, Kostas et al.

Ingår i Thin Solid Films, s. 7779-7784, 2011

• DOI för Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides

Studies of hysteresis effect in reactive HiPIMS deposition of oxides

Kubart, Tomas; Aiempanakit, M; Andersson, Joakim; Nyberg, Tomas et al.

Ingår i Surface & Coatings Technology, 2011

• DOI för Studies of hysteresis effect in reactive HiPIMS deposition of oxides

Sputter yield amplification by tungsten doping of Al(2)O(3) employing reactive serial co-sputtering: process characteristics and resulting film properties

Austgen, M; Koehl, D; Zalden, P; Kubart, Tomas et al.

Ingår i Journal of Physics D, s. 345501, 2011

• DOI för Sputter yield amplification by tungsten doping of Al(2)O(3) employing reactive serial co-sputtering: process characteristics and resulting film properties

Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness

Gao, Xindong; Andersson, Joakim; Kubart, Tomas; Nyberg, Tomas et al.

Ingår i Electrochemical and solid-state letters, 2011

Reactive sputtering of SiO₂–TiO₂ thin film from composite Si_x/TiO₂ targets

Liljeholm, Lina; Nyberg, Tomas; Kubart, Tomas; Roos, Arne et al.

Ingår i Vacuum, s. 317-321, 2010

• DOI för Reactive sputtering of SiO₂–TiO₂ thin film from composite Si_x/TiO₂ targets

Modelling of sputtering yield amplification effect in reactive deposition of oxides

Kubart, Tomas; Nyberg, Tomas; Pflug, A.; Siemers, M. et al.

Ingår i Surface & Coatings Technology, s. 3882-3886, 2010

• DOI för Modelling of sputtering yield amplification effect in reactive deposition of oxides

ERD analysis and modification of TiO2 thin films with heavy ions

Jensen, Jens; Martin, David; Surpi, Alessandro; Kubart, Tomas

Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 1893-1898, 2010

• DOI för ERD analysis and modification of TiO2 thin films with heavy ions

Modelling of low energy ion sputtering from oxide surfaces

Kubart, Tomas; Nyberg, Tomas; Berg, Sören

Ingår i Journal of Physics D, s. 205204, 2010

• DOI för Modelling of low energy ion sputtering from oxide surfaces

Localised modifications of anatase TiO2 thin films by a Focused Ion Beam

Surpi, Alessandro; Göthelid, Emmanuelle; Kubart, Tomas; Martin, David et al.

Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 3142-3146, 2010

• DOI för Localised modifications of anatase TiO2 thin films by a Focused Ion Beam

Implantation of anatase thin film with 100 keV ⁵⁶Fe ions: Damage formation and magnetic behaviour

Jensen, Jens; Sanz, R.; Martin, David; Surpi, Alessandro et al.

Ingår i Nuclear Instruments and Methods in Physics Research Section B, s. 2725-2730, 2009

• DOI för Implantation of anatase thin film with 100 keV ⁵⁶Fe ions: Damage formation and magnetic behaviour

Influence of the target composition on reactively sputtered titanium oxide films

Kubart, Tomas; Jensen, Jens; Nyberg, Tomas; Liljeholm, Lina et al.

Ingår i Vacuum, s. 1295-1298, 2009

• DOI för Influence of the target composition on reactively sputtered titanium oxide films

Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells

Schleussner, Sebastian; Kubart, Tomas; Törndahl, Tobias; Edoff, Marika

Ingår i Thin Solid Films, s. 5548-5552, 2009

• DOI för Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
• Ladda ner fulltext (pdf) av Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells

A model of DC reactive magnetron sputtering for graded solar thermal absorbers

Kubart, Tomas; Zhao, Shuxi; Wingqvist, Gunilla; Nyberg, Tomas et al.

Ingår i Journal of Physics, Conference Series, 2008

• DOI för A model of DC reactive magnetron sputtering for graded solar thermal absorbers

Nanoscale colour control: W-O graded coatings deposited by magnetron sputtering

Polcar, Tomas; Kubart, Tomas; Malainho, Eva; Vasilevskiy, Mikhail et al.

Ingår i Nanotechnology, s. 395202, 2008

• DOI för Nanoscale colour control: W-O graded coatings deposited by magnetron sputtering

High rate reactive magnetron sputter deposition of titanium oxide

Kubart, Tomas; Depla, Diederik; Martin, David; Nyberg, Tomas et al.

Ingår i Applied Physics Letters, s. 221501, 2008

• DOI för High rate reactive magnetron sputter deposition of titanium oxide

Experiments and modeling of dual reactive magnetron sputtering using two reactive gases

Kubart, Tomas; Trinh, D. H.; Liljeholm, L.; Hultman, L. et al.

Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, s. 565-570, 2008

• DOI för Experiments and modeling of dual reactive magnetron sputtering using two reactive gases

Direct current magnetron sputtering deposition of nanocomposite alumina – zirconia thin films

Trinh, D H; Kubart, Tomas; Nyberg, Tomas; Ottosson, M et al.

Ingår i Thin Solid Films, s. 8352-8358, 2008

• DOI för Direct current magnetron sputtering deposition of nanocomposite alumina – zirconia thin films

Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing

Kubart, Tomas; Polcar, Tomas; Kappertz, Oliver; Parreira, Nuno et al.

Ingår i Plasma Processes and Polymers, 2007

• DOI för Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing

Process Stabilization and Increase of the Deposition Rate in Reactive Sputtering of Metal Oxides and Oxynitrides

Severin, D; Kappertz, Oliver; Kubart, Tomas; Nyberg, Tomas et al.

Ingår i Appl Phys Lett, 2006

Dynamic behaviour of the reactive sputtering process

Kubart, Tomas; Kappertz, Oliver; Nyberg, Tomas; Berg, Sören

Ingår i Thin Solid Films, s. 421-424, 2006

Reactive high power impulse magnetron sputtering

Kubart, Tomas; Gudmundsson, Jon Tomas; Lundin, Daniel

Ingår i High Power Impulse Magnetron Sputtering, s. 223-263, Elsevier, 2020

• DOI för Reactive high power impulse magnetron sputtering

Reactive sputtering of CZTS

Platzer Björkman, Charlotte; Ericson, Tove; Scragg, Jonathan; Kubart, Tomas

Ingår i Copper zinc tin sulfide-based thin film solar cells, s. 203-220, John Wiley & Sons, 2015

CoCrFeMnNi High-Entropy Alloys for Lithium-Mediated Electrochemical Nitrogen Reduction

Thyr, Jakob; Araujo, Rafael; Dürr, Robin; Pehlivan, Esat et al.

2023

• Ladda ner fulltext (pdf) av CoCrFeMnNi High-Entropy Alloys for Lithium-Mediated Electrochemical Nitrogen Reduction

Flipping the physics classroom – First observations

Günter, Katerina; Al-Adili, Ali; Andersson Sundén, Erik; Bissi, Agnese et al.

2021

Organs-on-Chip System with Integrated Transparent Conductive Oxide Electrodes

Johansson, Sofia; Porras, Ana Maria; Searle, Sean; Barbe, Laurent et al.

2018

Scalability Study of Nickel Germanides

Jablonka, Lukas; Kubart, Thomas; Gustavsson, Fredrik; Primetzhofer, Daniel et al.

2016

Magnetron sputtering of InGaZnO and ZnSnO amorphous oxide semiconductors

Prusakova, Lucie; Aijaz, Asim; Nyberg, Tomas; Törndahl, Tobias et al.

Ingår i E-MRS Spring meeting 2015, May 11-15, Lille, France, 2015

Low-temperature synthesis of thermochromic vanadium dioxide thin films using reactive magnetron sputtering

Aijaz, Asim; Ji, Yu-Xia; Granqvist, Claes G; Niklasson, Gunnar A et al.

Ingår i Abstracts, 2015

Industrial Scale Deposition of Diamond-like Carbon Thin Films using Ne-based HiPIMS Discharge

Aijaz, Asim; Carreri, Felipe de Campos; Sabelfeld, Alex; Gerdes, Holger et al.

2015

Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering

Kubart, Tomas; Törndahl, Tobias; Moreira, Milena; Katardjiev, Ilia

Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015

Metallization of nanostructures by High Power Impulse Magnetron Sputtering

Kubart, Tomas; Jablonka, Lukas; Zhang, Zhen; Zhang, Shi-Li

Ingår i 4 th Magnetron, Ion processing & Arc Technologies European Conference, Paris, 8-11 December 2015, 2015

Deposition of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Aijaz, Asim; Ji, Yu-Xia; Montero, Jose; Granqvist, Claes-Göran et al.

2014

Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium

Ren, Yi; Scragg, Jonathan; Ericson, Tove; Kubart, Tomas et al.

2014

Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study

Kubart, Tomas; Moreira, Milena; Katardjiev, Ilia

Ingår i 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014

Reactive HiPIMS of Oxides: Hysteresis and Discharge behaviour

Kubart, Tomas; Helmersson, Ulf; Lundin, Daniel

Ingår i Invited talk, 42th International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 -May 2, 2014, 2014

Measurement of Ionized Metal Flux Fraction in HiPIMS by Retarding Field QCM Analyzer

Kubart, Tomas; Cada, Martin; Hubicka, Zdenek

Ingår i 41st International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 - May 2, 2014, 2014

Dynamics of the sputtering target surface evolution in reactive HiPIMS

Kubart, Tomas; Depla, Diederik

Ingår i Invited talk, 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014

Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings

Nyberg, Harald; Sundberg, Jill; Särhammar, Erik; Gustavsson, Fredrik et al.

Ingår i 19th International Conference on Wear of Materials 2013; 14-18 April 2013; Portland, OR, USA, 2013

Reactive magnetron sputtering: from fundamentals to high deposition rate processes

Kubart, Tomas

Ingår i Proceedings of the Twelfth th International Symposium on Sputtering & Plasma Processes ISSP 2013, s. 5-9, 2013

• Ladda ner fulltext (pdf) av Reactive magnetron sputtering: from fundamentals to high deposition rate processes

Investigation of ionized metal flux fraction in HiPIMS discharge with Ti and Ni target

Kubart, Tomas; Cada, Martin; Lundin, Daniel; Hubicka, Zdenek

2013

Mechanisms responsible for compositional variations of films sputtered from a WS2 target

Särhammar, Erik; Sundberg, Jill; Nyberg, Harald; Kubart, Tomas et al.

Ingår i International Conference on Metallurgical Coatings and Thin films (ICMCTF) 23-27/04 2012, San Diego, abstract number:428, 2012

Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

Aiempanakit, M; Aijaz, A; Lundin, D; Helmersson, U et al.

s. 9, 2012

Reactive sputtering of Fe₂O₃ thin films by high power pulsed plasma systems

Hubicka, Zdenek; Cada, Martin; Kmet, Stepan; Olejnicek, Jiri et al.

2012

High rate reactive magnetron sputtering of oxides using sputtering yield amplification

Kubart, Tomas; Nyberg, Tomas; Berg, Sören

2012

HiPIMS deposition of TiO_x in an industrial-scale apparatus: effects of target size and deposition geometry on hysteresis

Patelli, Alessandro; Colasuonno, Mario; Tosello, Martino; Giordani, Diego et al.

2012

Reactive magnetron sputtering of precursors for CZTS solar cells

Kubart, Tomas; Ericson, Tove; Scragg, Jonathan; Platzer-Björkman, Charlotte

2012

Modelling of reactive magnetron sputtering: Towards comprehensive model

Kubart, Tomas

2012

Quaternary W-S-C-Ti films for tribological applications

Sundberg, Jill; Särhammar, Erik; Nyberg, Harald; Kubart, Tomas et al.

2011

Sputter Yield Amplification of reactively sputtered TiO₂

Schmidt, Rüdiger; Kubart, Tomas; Austgen, Michael; Wagner, D et al.

2011

Hysteresis effect in reactive high power impulse magnetron sputtering of metal oxides

Aiempanakit, Montri; Aijaz, Asim; Helmersson, Ulf; Kubart, Tomas

2011

Modelling of target effects in reactive HIPIMS

Kubart, Tomas; Andersson, Joakim

Ingår i 2nd Internation Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011

Serial magnetron co-sputtering: Sputtering yield amplification and process modelling

Kubart, Tomas; Nyberg, Tomas; Berg, Soren; Austgen, Michael et al.

Ingår i E-MRS 2011 Spring Meeting, 2011

Synthesis of c-tilted AlN films with a good tilt and thickness uniformity

Moreira, Milena; Bjurström, Johan; Kubart, Tomas; Kuzavas, Björn et al.

Ingår i Proceedings of IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 1238-1241, 2011

Implantation and surface modification of TiO2 by a Focused Ion Beam

Jensen, Jens; Surpi, Alessandro; Kubart, Tomas; Hultman, Lars

Ingår i E-MRS 2011 Spring Meeting, 2011

Ion irradiation-induced modification of TiO2 thin films

Jensen, Jens; Aiempanakit, Montri; Kubart, Tomas

Ingår i E-MRS 2011 Spring Meeting, 2011

Nanocomposite coatings consisting of noble metal nanoclusters embedded into a dielectric matrix by reactive HIPIMS

Figueiredo, Nuno; Oliveira, Joao; Kubart, Tomas; Cavaleiro, Albano

Ingår i 2nd International Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011

Molecular dynamics simulations of low energy Ar sputtering of TiO2 surfaces

Kubart, Tomas; Arapan, Sergiu; Skorodumova, Natalia V.; Nyberg, Tomas et al.

2010

Studies of hysteresis effect in reactive HiPIMS deposition of oxides

Kubart, Tomas; Aiempanakit, M.; Andersson, J.; Nyberg, Tomas et al.

2010

Studies of TiN films deposited by HIPIMS at different substrate temperatures and substrate bias

Hallman, R.; Andersson, J.; Särhammar, Erik; Nyberg, Tomas et al.

2010

Sputtering Yield Amplification in Reactive Serial Co-Sputtering

Kubart, Tomas; Nyberg, Tomas; Berg, Sören; Pflug, A. et al.

2010

Sputtering yield amplification in reactive sputtering

Berg, Sören; Nyberg, Tomas; Kubart, Tomas

2010

Studies and Modelling of Surface Modifications of Different Oxides During Ion Bombardmen

Nyberg, Tomas; Kubart, Tomas; Berg, Sören

Ingår i Presented at the 7th Asian-European  International Conference on Plasma Surface Engineering (AEPSE 2009), Busan, South Korea,  September 20-25, 2009, 2009

Decorative Oxide Coatings: Colour Control by Compositional Gradient

Kubart, Tomas; Nyberg, Tomas; Polcar, T; Cavaleiro, A et al.

Ingår i E-MRS 2009, Spring Meeting in Strasbourgh, France, June 8-12, 2009, 2009

Stable High Rate Reactive Sputter Deposition of Aluminium Oxide from Segmented Targets of Aluminium and Aluminium Oxide

Särhammar, Erik; Nyberg, Tomas; Kubart, Tomas; Berg, Sören

Ingår i Presented at the International Symposium on Reactive Sputter Deposition (RSD2009),  Manchester, United Kingdom, December 10-11, 2009, 2009

Preferential Sputtering of Oxides and Target Design for Stable Reactive Magnetron Deposition of Oxides

Kubart, Tomas; Nyberg, Tomas; Berg, Sören

2009

Magnetic behaviour of Fe implanted TiO2 thin films

Sanz, R; Hernández-Vélez, M; Kubart, Tomas; Martin, David et al.

Ingår i Book of Abstracts, 2008

Damage formation in TiO2 by heavy ions: consequences for micro- and nano-struring

Jensen, Jens; Kubart, Tomas; Martin, David; Surpi, A et al.

Ingår i 7th International Symposium on Swift Heavy Ions in Matter (SHIM2008), 2008

Experiments and modelling of reactive sputtering using two reactive gases and two targets

Kubart, Tomas; Trinh, D H; Liljeholm, Lina; Hultman, Lars et al.

2007

A model of DC reactive magnetron sputtering for graded solar thermal absorbers

Kubart, Tomas; Zhao, Shuxi; Nyberg, Tomas; Berg, Sören et al.

2007

On the high rate reactive sputtering of substoichiometric titanium oxide targets

Kubart, Tomas; Depla, D; Martin, David; Nyberg, Tomas et al.

2007

State of the art in Reactive Magnetron Sputtering

Nyberg, Tomas; Kappertz, Oliver; Kubart, Tomas; Berg, Sören et al.

Ingår i Invited to The third Mikkeli International Industrial Coating Seminar, MIICS 2006, Mikkeli, Finland, March 16-18, 2006 and Conference Proceedings, 2006

Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing

Rosén, Daniel; Kubart, Tomas; Kappertz, Oliver; Nyberg, Tomas et al.

2006

Dynamic Modelling of Reactive Magnetron Sputtering

Kubart, Tomas; Kappertz, Oliver; Nyberg, Tomas; Berg, Sören

2006

Advanced Process Modelling of the Rotating Magnetron

Kappertz, Oliver; Kubart, Tomas; Nyberg, Tomas; Berg, Sören

2006

Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets

Nyberg, Tomas; Kappertz, Oliver; Rosén, Daniel; Kubart, Tomas et al.

Ingår i Proceedings of Society of Vacuum Coaters, s. 324.328, 2004

On the energy input in the reactive HiPIMS deposition of TiO₂

Fernandes, Daniel Filipe Félix; Kubart, Tomas

2025

Photoelectrocatalytic Conversion of Nitrates to Ammonia: TiO₂ active phase study

Silveira, Vitor; Fernandes, Daniel Filipe Félix; Bericat Vadell, Robert; Kubart, Tomas et al.