Ilia Katardjiev
Professor emer. vid Institutionen för elektroteknik; Fasta tillståndets elektronik
- Mobiltelefon:
- 070-425 08 92
- E-post:
- ilia.katardjiev@angstrom.uu.se
- Besöksadress:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postadress:
- Box 65
751 03 UPPSALA
- Akademiska meriter:
- PhD, professor i elektronik
Publikationer
Senaste publikationer
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Advances in Solar Concentration in view of power generation and building integration
2026
- DOI för Advances in Solar Concentration in view of power generation and building integration
- Ladda ner fulltext (pdf) av Advances in Solar Concentration in view of power generation and building integration
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Design of thin optical reflectors with a variable aperture
2026
- DOI för Design of thin optical reflectors with a variable aperture
- Ladda ner fulltext (pdf) av Design of thin optical reflectors with a variable aperture
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Evaluation of a Fractal Concentrator of Light at 100X
Ingår i 17th International Conference on Concentrator Photovoltaic Systems (CPV-17), 2022
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Optical Characterisation of a Fractal Solar Concentrator
2021
- DOI för Optical Characterisation of a Fractal Solar Concentrator
- Ladda ner fulltext (pdf) av Optical Characterisation of a Fractal Solar Concentrator
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A fractal concentrator of direct and indirect sunlight
Ingår i Clean Energy, s. 305-315, 2020
- DOI för A fractal concentrator of direct and indirect sunlight
- Ladda ner fulltext (pdf) av A fractal concentrator of direct and indirect sunlight
Alla publikationer
Artiklar i tidskrift
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A fractal concentrator of direct and indirect sunlight
Ingår i Clean Energy, s. 305-315, 2020
- DOI för A fractal concentrator of direct and indirect sunlight
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Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015
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Efficient RF voltage transformer with bandpass filter characteristics
Ingår i Electronics Letters, s. 198-199, 2013
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Thin film lamb wave resonators in frequency control and sensing applications: a review
Ingår i Journal of Micromechanics and Microengineering, 2013
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Ingår i Biomedical microdevices (Print), s. 279-289, 2012
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Ingår i Journal of Micromechanics and Microengineering, 2012
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Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
Ingår i IEEE Sensors Journal, s. 2653-2654, 2012
- DOI för Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
- Ladda ner fulltext (pdf) av Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
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An intermode-coupled thin-film micro-acoustic resonator
Ingår i Journal of Micromechanics and Microengineering, 2012
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Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
Ingår i Sensors, s. 6942-6953, 2011
- DOI för Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
- Ladda ner fulltext (pdf) av Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
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Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
Ingår i Vacuum, s. 23-26, 2011
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Ingår i Sensors and actuators. B, Chemical, s. 135-144, 2011
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Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
Ingår i Surface & Coatings Technology, s. 1033-1036, 2011
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Thin-film zero-group-velocity Lamb wave resonator
Ingår i Applied Physics Letters, 2011
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Sensitivity Features of Thin Film Plate Acoustic Wave Resonators
Ingår i IEEE Sensors Journal, s. 3330-3331, 2011
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Lamb wave resonant pressure micro-sensor utilizing a thin-film aluminium nitride membrane
Ingår i Journal of Micromechanics and Microengineering, 2011
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Ingår i Sensors and Actuators A-Physical, s. 111-116, 2010
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FBAR sensor array for in liquid operation
Ingår i IEEE Sensors Journal, s. 1903-1904, 2010
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Ingår i Journal of Micromechanics and Microengineering, 2010
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Ingår i Journal of Micromechanics and Microengineering, 2009
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Improved Properties of AlON/4H-SiC Interface for Passivation Studies
Ingår i Materials Science Forum, s. 763-766, 2009
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Thick NiSi Electrodes for AlN Electroacoustic Applications
Ingår i Electrochemical and solid-state letters, 2009
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Micromachined Thin Film Plate Acoustic Wave Resonators (FPAR) Part II
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 2701-2710, 2009
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Ingår i Applied Physics Letters, s. 151911, 2009
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Optimisation of a smooth multilayer Nickel Silicide surface for ALN growth
Ingår i Journal of Physics, Conference Series, 2008
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Oscillators Based on Monolithically Integrated AlN TFBARs
Ingår i IEEE transactions on microwave theory and techniques, s. 3209-3216, 2008
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Mass sensitivity of multilayer thin film resonant BAW sensors
Ingår i Sensors and Actuators A-Physical, s. 88-95, 2008
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Fundamentals of the grating-assisted surface acoustic wave-plate bulk acoustic wave interaction
Ingår i Journal of Applied Physics, 2008
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Solidly mounted thin film electro-acoustic resonator utilizing a conductive Bragg reflector
Ingår i Sensors and Actuators A-Physical, s. 598-602, 2008
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Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 87-95, 2007
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Immunosensor utilizing a shear mode thin film bulk acoustic sensor
Ingår i Sensors and actuators. B, Chemical, s. 248-252, 2007
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Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media
Ingår i Sensors and actuators. B, Chemical, s. 466-473, 2007
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Temperature compensation of liquid FBAR sensors
Ingår i Journal of Micromechanics and Microengineering, s. 651-658, 2007
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Ingår i Journal of Micromechanics and Microengineering, s. 1869-1874, 2006
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Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 2095-2100, 2006
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Quasistatic Transduction of the Fundamental Symmetric Lamb Mode in Longitudinal Wave Transducers
Ingår i Applied Physics Letters, s. 214101, 2006
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Ingår i Ultrasonics, s. 208-212, 2006
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New materials for chemical and biosensors
Ingår i Materials and Manufactoring Processes, s. 253-256, 2006
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Computer simulations of surface analysis using ion beams
Ingår i Progress in Surface Science, 2006
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Thin film Lamb wave resonant structures - The first approach
Ingår i Solid-State Electronics, s. 322-326, 2006
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Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 1170-1174, 2005
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Ingår i Journal of Applied Physics, 2005
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Ingår i Microchimica Acta, s. 67-74, 2004
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Ingår i Nuclear Instruments and Methods in Physics Research, s. 24-30, 2003
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Electrical Characterization of AlN MIS and MIM Structures
Ingår i IEEE Trans Electron Devices, s. 1214-1219, 2003
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Ingår i Journal of Materials Research, s. 423, 2003
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Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature
Ingår i J Mat Res, s. 1469-1475, 2002
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Na0.5K0.5NbO3 Thin Films for Voltage Controlled Acoustoelectric Device Applications
Ingår i Appl Phys Lett, s. 3171-3173, 2002
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Selective Etching of Al/AlN Structures for Metallization of SAW Devices
Ingår i J Vac Sci Technol, s. 843, 2002
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Ingår i J Vac Sci Technol, s. 2664-2669, 2001
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Frequency response in pulsed DC reactive sputtering processes
Ingår i Thin Solid Films, s. 43-48, 2000
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Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition
Ingår i J. Vac. Sci. Technol. A, s. 1609-1612, 2000
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Preferential sputtering effects in thin film processing
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1916-1925, 1999
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Ingår i THIN SOLID FILMS, s. 227-232, 1999
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Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering
Ingår i Surface and Coatings Technology, s. 751-754, 1999
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Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation
Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 1-6, 1998
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Preferential Sputtering Effects in the Deposition of TiAl Films by Filtered Cathodic Arc Deposition
Ingår i Nucl Instr Phys Res B, s. 207-209, 1997
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Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl-2
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 686-691, 1997
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A Method for the Determination of the Angular Dependence during Dry Etching
Ingår i Journal of Vacuum Science & Technology B, s. 3239, 1996
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Resputtering effects during ion beam assisted deposition and the sputter yield amplification effect
Ingår i Surface & Coatings Technology, s. 353-362, 1996
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Controlled topography production - True 3D simulation and experiment
Ingår i Vacuum, s. 971-975, 1995
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Synergistic sputtering effects during ion bombardment with two ion species
Ingår i J Vac Sci Technol, s. 831-833, 1995
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X-ray reflection, a technique for measuring sputtering yields of thin film
Ingår i Nuclear Instruments and Methods in Physics Research Section B:: Beam Interactions with Materials and Atoms, s. 395-403, 1994
Artiklar, forskningsöversikt
Konferensbidrag
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Evaluation of a Fractal Concentrator of Light at 100X
Ingår i 17th International Conference on Concentrator Photovoltaic Systems (CPV-17), 2022
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Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015
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Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study
Ingår i 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014
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AlN Solidly Mounted Resonators for High Temperature Applications
Ingår i 2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), s. 1524-1527, 2014
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Thin Film Lamb Wave Resonant Topologies for Frequency Controland Sensing Applications
Ingår i 2012 Int. Symposium on Acoustic Wave devices for Future Mobile Communications, s. 165-170, 2012
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Parametric Study of Thin-film Zero-Group Velocity Resonators
Ingår i 2012 IEEE International Utrasonics Symposium (IUS), s. 307-310, 2012
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Advances in the Lamb wave resonator technology
Ingår i International Symposium on Utrasonics, ferroelectrics and frequency control, 2012
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Propagation Characteristics of Surface Acoustic Waves under Hexagonal Phononic Gratings
Ingår i Proceedings of the IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 2503-2506, 2012
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Ingår i More than moore, 2012
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Recent advances in the thin film electro-acoustic technology
2012
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Synthesis of c-tilted AlN films with a good tilt and thickness uniformity
Ingår i Proceedings of IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 1238-1241, 2011
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Polymer coated thin film plate acoustic resonators (FPAR) for gas sensing applications
Ingår i 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum Proceedings, San Fransisco, CA, USA, 2011
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Thin Film Plate Wave Resonant Sensor for Pressure and Gravimetric Measurements
Ingår i Procedia Engineering 25, Eurosensors XXV, s. 571-574, 2011
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Drift in thin film SOI piezoresistors
Ingår i Proc. of EUROSOI Workshop, 2010 Jan 25-27, Grenoble, France, s. 71-72, 2010
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Micromachined Thin film Plate Acoustic Resonators (FPAR): Theory and Applications
2010
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Interface acoustic wave based manipulation of sub-micrometer particles in microfluidic channels
Ingår i Proceedings. 2009 Inernational IEEE Ultrasonic Symposium, 2009
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Analysis of Q-degradation and Cross-Talk in BAW Sensor Arrays Operating in Conductive Liquid Media
2009
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Ingår i Proceedings of Eurosensors May 2009, Procedia Chemistry vol 1 (1), s. 80-83, 2009
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IC-compatible Power Oscillators Using Thin Film Plate Acoustic Resonator (FPAR)
Ingår i Proceedings 2009 IEEE International Ultrasonics Symposium, 2009
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Coupled Mode approach to the analysis of thin film S0 lamb wave resonators
Ingår i Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International, s. 79-84, 2009
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Thick Silicides Synthesised With Smooth Surface for Integrated TFBAR Applications
Ingår i 2008 European Frequency and Time Forum, Toulouse, France, 2008
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A 2 GHz oscillator using a monolithically integrated AlN TFBAR
s. 843-846, 2008
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Thin film bulk acoustic resonators (FBARs) for biosensor applications
2008
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Temperature Compensation of Thin Film Resonators utilizing the Lowest order Symmetric Lamb mode
Ingår i Proc. 2008 Int. IEEE Ultrason. Symp., 2008 Beijing, China, 2008
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Improved Thermal Characteristics in SOI using a Buried Aluminium Nitride Insulator
Ingår i EUROSOI Workshop, s. 97-98, 2008
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Analysis of Resonant SAW -Plate BAW Interaction in Periodical Couplers
2008
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Buried aluminum nitride insulator for improving thermal conduction in SOI
Ingår i Proceedings of IEEE SOI Conference, s. 105-106, 2008
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Presentation of the VINN Excellence Center for Wireless Sensor Networks (WISENET)
Ingår i Conference on Radio Science (RVK08), 2008
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Optimisation of a smooth multilayer Nickel Silicide surface for ALN growth
2007
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Synthesis of highly textured thin piezoelectric AlN films with a tilted c-axis
2007
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Mass Sensitivity of Thin Film Resonator Device
2007
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Thin AlN film resonators utilizing the lowest order symmetric lamb mode: Further developments
s. 1067-1072, 2007
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Improved properties of AlON/4H-SiC interface for passivation
2007
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High velocity plate modes in TFBARs: properties and devices
2007
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2007
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Buried Aluminum Nitride Insulator for SOI Substrates
Ingår i Proc. of EUROSOI Workshop, s. 67-68, 2007
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Immunosensor utilizing Shear mode thin film bulk acoustic sensor
2006
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Recent advances in the thin film electroacoustic technology
2006
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Design and Fabrication of Temperature Compensated Liquid FBAR Sensors
2006
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Electric Field Sensitivity of Thin Film Resonators Based on Piezoelectric AlN thin films
2006
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Ingår i Proc Int IEEE Ultrason Symp, 2005
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Shear mode AlN thin film electroacoustic resonator for biosensor applications
Ingår i Proceedings International IEEE Ultrasonsonics Symposium, 2005
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Ingår i Proc. 2005 Gigahertz Symp., Uppsala, Sweden, October 2005, 2005
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Thin Film Electro-Acoustic Devices Utilising Buried Electrodes
Ingår i Proc. 2005 Gigahertz Symp., Uppsala, Sweden, October 2005, 2005
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Ingår i Int. IEEE Ultrasonic Symposia 2005, 2005
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An improved electrodeless solidly mounter thin film resonator
Ingår i Proc Int IEEE Ultrason Symp, 2005
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A 2 GHz oscillator based on a solidly mounted thin film bulk acoustic wave resonator
Ingår i Proc of the IEEE MMT-S, International microwave symposium, 2005
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A Simplified Treatment of Target Implantation Effects in Reactive Sputtering
Ingår i The International Conference on Metallurgical Coatings and Thin Films in San Diego, USA, 2004
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New Materials for chemical and biosensors
Ingår i International Symposium on Advanced Materials and Processing, ISAMAP2K4, 6-8 December, I.I. T., Kharagpur, India, 2004
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Complex Target Poisoning Effects in Reactive Sputtering
Ingår i American Vacuum Society Symposium & Exhibition, Anaheim USA, 2004
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TRIDYN simulation of target poisoning in reactive sputtering
Ingår i COSIRES, Finland, 2004
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Ingår i IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003
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Suppression of Spurious Lateral Modes in Thickness Excited FBAR Resonators
Ingår i IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003
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Basic Understanding of the Pulsed DC Reactive Spitter Deposition Process
Ingår i The 4th Asian-European Int Conf on Plasma Surface Engineering, AEPSE 2003, Jeju City, South Korea, September 28-October 2, 2003, 2003
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Synthesis of C-AxisOriented AlN Thin Films on Metal Layers: Al, Mo, Ti, TiN and Ni
Ingår i International Conference on Ultrasonics, Ferroelectrics and Frequency Control, Proceedings 1, s. 311-315, 2003
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Room temperature synthesis of c-axis oriented AlN thin piezoelectric films
Ingår i Presented at the AVS 2001, 2001
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Selective Etching of Al/AlN Structures for Metallization of SAW Devices
Ingår i Presented at AVS 2001, 2001
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Basic Understanding of the Pulsed DC Reactive Sputter Deposition Process
Ingår i Invited to Second Asian-European Int Conf on Plasma Surface Engineering (AEPSE´99), Beijing, September 15-19, 1999
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Analysis and Simulation of Mask Erosion During Etching
Ingår i American Vacuum Society 46th National Symposium, Seattle, USA, 1999
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Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering
Ingår i Proc of the 6th Int Conf on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 1998
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Characterization and optimization of a dry etching process for silicon nitride spacer formation
Ingår i The 44th international symposium of the American Vacuum Society, San José, USA, 1997
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Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl2
Ingår i The 43rd International Symposium of the American Vacuum Society, Philadelphia PA, USA, 1997
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An experimental study and simulation of anisotropic wet etching of quartz
Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996
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A new self aligned asymmetric lateral bipolar transistor
Ingår i The 17th Nordic Semiconductor Meeting, Norway, June, 1996
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A method for the determination of the angular dependence during dry etching
Ingår i The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995
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Ingår i The 42nd international symposium of the American Vacuum Society, San José, USA, 1995
Manuskript (preprint)
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Sun Tracking Method for Fractal Concentrator Panels
- DOI för Sun Tracking Method for Fractal Concentrator Panels
- Ladda ner fulltext (pdf) av Sun Tracking Method for Fractal Concentrator Panels
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Characterization of Fractal Concentrators of Light at High Concentrations
- DOI för Characterization of Fractal Concentrators of Light at High Concentrations
- Ladda ner fulltext (pdf) av Characterization of Fractal Concentrators of Light at High Concentrations
Patent
Rapporter
Övriga
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Advances in Solar Concentration in view of power generation and building integration
2026
- DOI för Advances in Solar Concentration in view of power generation and building integration
- Ladda ner fulltext (pdf) av Advances in Solar Concentration in view of power generation and building integration
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Optical Characterisation of a Fractal Solar Concentrator
2021
- DOI för Optical Characterisation of a Fractal Solar Concentrator
- Ladda ner fulltext (pdf) av Optical Characterisation of a Fractal Solar Concentrator
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2020
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WISENET Wireless Sensor Networks VINN Excellence Center
2007