Ilia Katardjiev
Professor i fasta tillståndets elektronik vid Institutionen för elektroteknik; Fasta tillståndets elektronik
- Mobiltelefon:
- 070-425 08 92
- E-post:
- ilia.katardjiev@angstrom.uu.se
- Besöksadress:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postadress:
- Box 65
751 03 UPPSALA
- Akademiska meriter:
- PhD, professor i elektronik
Publikationer
Senaste publikationer
Evaluation of a Fractal Concentrator of Light at 100X
Ingår i 17th International Conference on Concentrator Photovoltaic Systems (CPV-17), 2022
Optical Characterisation of a Fractal Solar Concentrator
2021
- DOI för Optical Characterisation of a Fractal Solar Concentrator
- Ladda ner fulltext (pdf) av Optical Characterisation of a Fractal Solar Concentrator
A fractal concentrator of direct and indirect sunlight
Ingår i Clean Energy, s. 305-315, 2020
- DOI för A fractal concentrator of direct and indirect sunlight
- Ladda ner fulltext (pdf) av A fractal concentrator of direct and indirect sunlight
2020
Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015
Alla publikationer
Artiklar i tidskrift
A fractal concentrator of direct and indirect sunlight
Ingår i Clean Energy, s. 305-315, 2020
- DOI för A fractal concentrator of direct and indirect sunlight
- Ladda ner fulltext (pdf) av A fractal concentrator of direct and indirect sunlight
Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
Ingår i Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015
Efficient RF voltage transformer with bandpass filter characteristics
Ingår i Electronics Letters, s. 198-199, 2013
Thin film lamb wave resonators in frequency control and sensing applications: a review
Ingår i Journal of Micromechanics and Microengineering, 2013
Ingår i Biomedical microdevices (Print), s. 279-289, 2012
An intermode-coupled thin-film micro-acoustic resonator
Ingår i Journal of Micromechanics and Microengineering, 2012
Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
Ingår i IEEE Sensors Journal, s. 2653-2654, 2012
- DOI för Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
- Ladda ner fulltext (pdf) av Tilted c-Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity
Ingår i Journal of Micromechanics and Microengineering, 2012
Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
Ingår i Sensors, s. 6942-6953, 2011
- DOI för Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
- Ladda ner fulltext (pdf) av Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)
Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications
Ingår i Vacuum, s. 23-26, 2011
Ingår i Sensors and actuators. B, Chemical, s. 135-144, 2011
Sensitivity Features of Thin Film Plate Acoustic Wave Resonators
Ingår i IEEE Sensors Journal, s. 3330-3331, 2011
Lamb wave resonant pressure micro-sensor utilizing a thin-film aluminium nitride membrane
Ingår i Journal of Micromechanics and Microengineering, 2011
Thin-film zero-group-velocity Lamb wave resonator
Ingår i Applied Physics Letters, 2011
Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
Ingår i Surface & Coatings Technology, s. 1033-1036, 2011
Ingår i Sensors and Actuators A-Physical, s. 111-116, 2010
FBAR sensor array for in liquid operation
Ingår i IEEE Sensors Journal, s. 1903-1904, 2010
Ingår i Journal of Micromechanics and Microengineering, 2010
Ingår i Journal of Micromechanics and Microengineering, 2009
Improved Properties of AlON/4H-SiC Interface for Passivation Studies
Ingår i Materials Science Forum, s. 763-766, 2009
Thick NiSi Electrodes for AlN Electroacoustic Applications
Ingår i Electrochemical and solid-state letters, 2009
Micromachined Thin Film Plate Acoustic Wave Resonators (FPAR) Part II
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 2701-2710, 2009
Ingår i Applied Physics Letters, s. 151911, 2009
Optimisation of a smooth multilayer Nickel Silicide surface for ALN growth
Ingår i Journal of Physics, Conference Series, 2008
Oscillators Based on Monolithically Integrated AlN TFBARs
Ingår i IEEE transactions on microwave theory and techniques, s. 3209-3216, 2008
Mass sensitivity of multilayer thin film resonant BAW sensors
Ingår i Sensors and Actuators A-Physical, s. 88-95, 2008
Fundamentals of the grating-assisted surface acoustic wave-plate bulk acoustic wave interaction
Ingår i Journal of Applied Physics, 2008
Solidly mounted thin film electro-acoustic resonator utilizing a conductive Bragg reflector
Ingår i Sensors and Actuators A-Physical, s. 598-602, 2008
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 87-95, 2007
Immunosensor utilizing a shear mode thin film bulk acoustic sensor
Ingår i Sensors and actuators. B, Chemical, s. 248-252, 2007
Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous media
Ingår i Sensors and actuators. B, Chemical, s. 466-473, 2007
Temperature compensation of liquid FBAR sensors
Ingår i Journal of Micromechanics and Microengineering, s. 651-658, 2007
Ingår i Journal of Micromechanics and Microengineering, s. 1869-1874, 2006
Quasistatic Transduction of the Fundamental Symmetric Lamb Mode in Longitudinal Wave Transducers
Ingår i Applied Physics Letters, s. 214101, 2006
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 2095-2100, 2006
Ingår i Ultrasonics, s. 208-212, 2006
New materials for chemical and biosensors
Ingår i Materials and Manufactoring Processes, s. 253-256, 2006
Computer simulations of surface analysis using ion beams
Ingår i Progress in Surface Science, 2006
Thin film Lamb wave resonant structures - The first approach
Ingår i Solid-State Electronics, s. 322-326, 2006
Synthesis of c-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni
Ingår i IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, s. 1170-1174, 2005
Ingår i Journal of Applied Physics, 2005
Ingår i Microchimica Acta, s. 67-74, 2004
Electrical Characterization of AlN MIS and MIM Structures
Ingår i IEEE Trans Electron Devices, s. 1214-1219, 2003
Ingår i Nuclear Instruments and Methods in Physics Research, s. 24-30, 2003
Ingår i Journal of Materials Research, s. 423, 2003
Selective Etching of Al/AlN Structures for Metallization of SAW Devices
Ingår i J Vac Sci Technol, s. 843, 2002
Reactive Sputter Deposition of Highly Oriented AlN Films at Room Temperature
Ingår i J Mat Res, s. 1469-1475, 2002
Na0.5K0.5NbO3 Thin Films for Voltage Controlled Acoustoelectric Device Applications
Ingår i Appl Phys Lett, s. 3171-3173, 2002
Ingår i J Vac Sci Technol, s. 2664-2669, 2001
Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition
Ingår i J. Vac. Sci. Technol. A, s. 1609-1612, 2000
Frequency response in pulsed DC reactive sputtering processes
Ingår i Thin Solid Films, s. 43-48, 2000
Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering
Ingår i Surface and Coatings Technology, s. 751-754, 1999
Ingår i THIN SOLID FILMS, s. 227-232, 1999
Preferential sputtering effects in thin film processing
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 1916-1925, 1999
Etch rates of crystallographic planes in Z-cut quartz - experiments and simulation
Ingår i JOURNAL OF MICROMECHANICS AND MICROENGINEERING, s. 1-6, 1998
Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl-2
Ingår i JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, s. 686-691, 1997
Preferential Sputtering Effects in the Deposition of TiAl Films by Filtered Cathodic Arc Deposition
Ingår i Nucl Instr Phys Res B, s. 207-209, 1997
A Method for the Determination of the Angular Dependence during Dry Etching
Ingår i Journal of Vacuum Science & Technology B, s. 3239, 1996
Resputtering effects during ion beam assisted deposition and the sputter yield amplification effect
Ingår i Surface & Coatings Technology, s. 353-362, 1996
Controlled topography production - True 3D simulation and experiment
Ingår i Vacuum, s. 971-975, 1995
Synergistic sputtering effects during ion bombardment with two ion species
Ingår i J Vac Sci Technol, s. 831-833, 1995
X-ray reflection, a technique for measuring sputtering yields of thin film
Ingår i Nuclear Instruments and Methods in Physics Research Section B:: Beam Interactions with Materials and Atoms, s. 395-403, 1994
Artiklar, forskningsöversikt
Konferensbidrag
Evaluation of a Fractal Concentrator of Light at 100X
Ingår i 17th International Conference on Concentrator Photovoltaic Systems (CPV-17), 2022
Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Ingår i 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015
Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study
Ingår i 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014
AlN Solidly Mounted Resonators for High Temperature Applications
Ingår i 2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), s. 1524-1527, 2014
Thin Film Lamb Wave Resonant Topologies for Frequency Controland Sensing Applications
Ingår i 2012 Int. Symposium on Acoustic Wave devices for Future Mobile Communications, s. 165-170, 2012
Parametric Study of Thin-film Zero-Group Velocity Resonators
Ingår i 2012 IEEE International Utrasonics Symposium (IUS), s. 307-310, 2012
Propagation Characteristics of Surface Acoustic Waves under Hexagonal Phononic Gratings
Ingår i Proceedings of the IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 2503-2506, 2012
Advances in the Lamb wave resonator technology
Ingår i International Symposium on Utrasonics, ferroelectrics and frequency control, 2012
Ingår i More than moore, 2012
Recent advances in the thin film electro-acoustic technology
2012
Synthesis of c-tilted AlN films with a good tilt and thickness uniformity
Ingår i Proceedings of IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, s. 1238-1241, 2011
Thin Film Plate Wave Resonant Sensor for Pressure and Gravimetric Measurements
Ingår i Procedia Engineering 25, Eurosensors XXV, s. 571-574, 2011
Polymer coated thin film plate acoustic resonators (FPAR) for gas sensing applications
Ingår i 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum Proceedings, San Fransisco, CA, USA, 2011
Drift in thin film SOI piezoresistors
Ingår i Proc. of EUROSOI Workshop, 2010 Jan 25-27, Grenoble, France, s. 71-72, 2010
Micromachined Thin film Plate Acoustic Resonators (FPAR): Theory and Applications
2010
Analysis of Q-degradation and Cross-Talk in BAW Sensor Arrays Operating in Conductive Liquid Media
2009
Interface acoustic wave based manipulation of sub-micrometer particles in microfluidic channels
Ingår i Proceedings. 2009 Inernational IEEE Ultrasonic Symposium, 2009
Ingår i Proceedings of Eurosensors May 2009, Procedia Chemistry vol 1 (1), s. 80-83, 2009
IC-compatible Power Oscillators Using Thin Film Plate Acoustic Resonator (FPAR)
Ingår i Proceedings 2009 IEEE International Ultrasonics Symposium, 2009
Coupled Mode approach to the analysis of thin film S0 lamb wave resonators
Ingår i Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International, s. 79-84, 2009
Thick Silicides Synthesised With Smooth Surface for Integrated TFBAR Applications
Ingår i 2008 European Frequency and Time Forum, Toulouse, France, 2008
A 2 GHz oscillator using a monolithically integrated AlN TFBAR
s. 843-846, 2008
Thin film bulk acoustic resonators (FBARs) for biosensor applications
2008
Temperature Compensation of Thin Film Resonators utilizing the Lowest order Symmetric Lamb mode
Ingår i Proc. 2008 Int. IEEE Ultrason. Symp., 2008 Beijing, China, 2008
Analysis of Resonant SAW -Plate BAW Interaction in Periodical Couplers
2008
Buried aluminum nitride insulator for improving thermal conduction in SOI
Ingår i Proceedings of IEEE SOI Conference, s. 105-106, 2008
Improved Thermal Characteristics in SOI using a Buried Aluminium Nitride Insulator
Ingår i EUROSOI Workshop, s. 97-98, 2008
Presentation of the VINN Excellence Center for Wireless Sensor Networks (WISENET)
Ingår i Conference on Radio Science (RVK08), 2008
Optimisation of a smooth multilayer Nickel Silicide surface for ALN growth
2007
Synthesis of highly textured thin piezoelectric AlN films with a tilted c-axis
2007
Mass Sensitivity of Thin Film Resonator Device
2007
High velocity plate modes in TFBARs: properties and devices
2007
Improved properties of AlON/4H-SiC interface for passivation
2007
Thin AlN film resonators utilizing the lowest order symmetric lamb mode: Further developments
s. 1067-1072, 2007
2007
Buried Aluminum Nitride Insulator for SOI Substrates
Ingår i Proc. of EUROSOI Workshop, s. 67-68, 2007
Recent advances in the thin film electroacoustic technology
2006
Immunosensor utilizing Shear mode thin film bulk acoustic sensor
2006
Design and Fabrication of Temperature Compensated Liquid FBAR Sensors
2006
Electric Field Sensitivity of Thin Film Resonators Based on Piezoelectric AlN thin films
2006
Ingår i Proc Int IEEE Ultrason Symp, 2005
Shear mode AlN thin film electroacoustic resonator for biosensor applications
Ingår i Proceedings International IEEE Ultrasonsonics Symposium, 2005
Ingår i Proc. 2005 Gigahertz Symp., Uppsala, Sweden, October 2005, 2005
Thin Film Electro-Acoustic Devices Utilising Buried Electrodes
Ingår i Proc. 2005 Gigahertz Symp., Uppsala, Sweden, October 2005, 2005
Ingår i Int. IEEE Ultrasonic Symposia 2005, 2005
An improved electrodeless solidly mounter thin film resonator
Ingår i Proc Int IEEE Ultrason Symp, 2005
A 2 GHz oscillator based on a solidly mounted thin film bulk acoustic wave resonator
Ingår i Proc of the IEEE MMT-S, International microwave symposium, 2005
A Simplified Treatment of Target Implantation Effects in Reactive Sputtering
Ingår i The International Conference on Metallurgical Coatings and Thin Films in San Diego, USA, 2004
Complex Target Poisoning Effects in Reactive Sputtering
Ingår i American Vacuum Society Symposium & Exhibition, Anaheim USA, 2004
New Materials for chemical and biosensors
Ingår i International Symposium on Advanced Materials and Processing, ISAMAP2K4, 6-8 December, I.I. T., Kharagpur, India, 2004
TRIDYN simulation of target poisoning in reactive sputtering
Ingår i COSIRES, Finland, 2004
Ingår i IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003
Suppression of Spurious Lateral Modes in Thickness Excited FBAR Resonators
Ingår i IEEE Ultrasonics Symposium, Honolulu, Hawaii, USA, 2003, 2003
Basic Understanding of the Pulsed DC Reactive Spitter Deposition Process
Ingår i The 4th Asian-European Int Conf on Plasma Surface Engineering, AEPSE 2003, Jeju City, South Korea, September 28-October 2, 2003, 2003
Synthesis of C-AxisOriented AlN Thin Films on Metal Layers: Al, Mo, Ti, TiN and Ni
Ingår i International Conference on Ultrasonics, Ferroelectrics and Frequency Control, Proceedings 1, s. 311-315, 2003
Room temperature synthesis of c-axis oriented AlN thin piezoelectric films
Ingår i Presented at the AVS 2001, 2001
Selective Etching of Al/AlN Structures for Metallization of SAW Devices
Ingår i Presented at AVS 2001, 2001
Analysis and Simulation of Mask Erosion During Etching
Ingår i American Vacuum Society 46th National Symposium, Seattle, USA, 1999
Basic Understanding of the Pulsed DC Reactive Sputter Deposition Process
Ingår i Invited to Second Asian-European Int Conf on Plasma Surface Engineering (AEPSE´99), Beijing, September 15-19, 1999
Ion assisted deposition of Zn-Mg coatings by unbalanced magnetron sputtering
Ingår i Proc of the 6th Int Conf on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 1998
Characterization and optimization of a dry etching process for silicon nitride spacer formation
Ingår i The 44th international symposium of the American Vacuum Society, San José, USA, 1997
Angular dependence of the polysilicon etch rate during dry etching in SF6 and Cl2
Ingår i The 43rd International Symposium of the American Vacuum Society, Philadelphia PA, USA, 1997
An experimental study and simulation of anisotropic wet etching of quartz
Ingår i MME´96, Oct 21-22, Barcelona, Spain, 1996
A new self aligned asymmetric lateral bipolar transistor
Ingår i The 17th Nordic Semiconductor Meeting, Norway, June, 1996
A method for the determination of the angular dependence during dry etching
Ingår i The American Vacuum Society, 42nd National Symposium, Minneapolis, USA, Oct, 1995
Ingår i The 42nd international symposium of the American Vacuum Society, San José, USA, 1995
Manuskript (preprint)
Sun Tracking Method for Fractal Concentrator Panels
- DOI för Sun Tracking Method for Fractal Concentrator Panels
- Ladda ner fulltext (pdf) av Sun Tracking Method for Fractal Concentrator Panels
Characterization of Fractal Concentrators of Light at High Concentrations
- DOI för Characterization of Fractal Concentrators of Light at High Concentrations
- Ladda ner fulltext (pdf) av Characterization of Fractal Concentrators of Light at High Concentrations