Process Technology of Semiconductor Devices, Part II – Experiment, 5 credits
Processteknik för halvledarkomponenter, del II – Experiment
Course information
Language of instruction: English
Course period: 2 (April-June 2026)
Course structure: Campus
Recommended prerequisites
MSc education or equivalent in physics, engineering physics, electrical engineering, electronics, embedded systems, physical chemistry or materials science. Students should have completed the course Process Technology of Semiconductor Devices part 1, Theory or equivalent courses.”
Learning outcomes
After completing the course, the students should be able to:
- be familiar with the necessary fabrication and characterization techniques (reaching basic level),
- establish the routine for forming a complete process flow for realization of task device structures with anticipated functionality and performance (reaching advanced level),
- assess the fabricated devices from both simulation and practice viewpoint, and propose improvements (achieving master level).
Learning outcomes for doctoral degree
The development of advanced electronic systems today relies on the successful design and fabrication of functional semiconductor devices, often at the micro- and fectively to this field, doctoral students must acquire not only theoretical understanding but also practical competence in semiconductor process technologies and their integration into devices.
This course is designed to strengthen doctoral students’ ability to develop novel devices as proof-of-concepts within their research projects. Building on the theoretical foundation from Process Technology of Semiconductor Devices, Part 1 – Theory (given in Spring 2025), this course provides hands-on experience in:
- Development of process protocol to fabricate devices;
- Device fabrication in the cleanroom environment;
- Structural and electrical characterization for inspection and evaluation.
This course combines laboratory fabrication with complementary simulation and lectures to create a comprehensive training platform.
The learning outcomes are interdisciplinary by nature, reflecting the research strengths of several doctoral programs within the Faculty: Solid-State Electronics (Department of Electrical Engineering), Microsystem Technology (Department of Materials Science and Engineering), and Condensed Matter Physics of Energy Materials (Department of Physics and Astronomy). In previous offerings (2023 and 2025), the course attracted participants not only from these programs but also from the Department of Information Technology, highlighting its broad relevance. By completing this course, doctoral students will be able to:
- Understand and apply process modules developed in CMOS technology, and recognize their transferability to microsystem technologies (MEMS);
- Integrate theoretical and practical knowledge to develop proof-of-concept devices within their doctoral research projects;
- Develop a process protocol to fabricate devices;
- Fabricate semiconductor devices in a cleanroom environment using standard silicon process technology;
- Employ structural, optical, and microscopic characterization methods to inspect and evaluate fabricated devices;
- Analyze and discuss emerging applications of process technology in spintronics, quantum electronics, and neuromorphic electronics, life science and other interdisciplinary research contexts.
Course contents
- Development of process protocol and formulation of a functional process flow sheet, based on systematic understanding of both different process techniques and target device performances.
- Structural and electronic characterization instruments.
- Operation of at least three different tools for the required process modules, such as oxidation of silicon wafers, metal deposition by means of sputtering, optical lithography, plasma-based etching, etc.
The representative device structure chosen for fabrication in this course is a p-n diodes. Besides, the students are encouraged to propose their own device design and fabrication tasks. The students can also be assigned tasks for electronic devices if they do not have their own. In either case, the instructors will work with them in teams, each comprising 2 students. The work consists of formulation of a functional process flow.
Instruction
• 1 × 3 hours for tutorials on process protocol development.
• 5 × 4 hours for device processing in the cleanroom laboratory;
• 4 × 4 hours for individual supervision on process design and formulation of process protocol;
• 4 × 1 hours on electrical characterization;
• 4 × 1 hours for lectures on structural and optical characterization.
Assessment
Comprising three complementary assessment parts:
- Approved device process flow.
- Independent processing in the laboratory (2 students per team).
- Lab report.
Course examiner
Ngan Pham, ngan.pham@angstrom.uu.se
Department with main responsibility
Electrical Engineering
Contact person
Ngan Pham, ngan.pham@angstrom.uu.se
Application
Submit the application for admission to: ngan.pham@angtrom.uu.se
Submit the application not later than: March 15, 2026