Tomas Kubart
Senior Lecturer/Associate Professor at Department of Electrical Engineering; Solid-State Electronics
- Telephone:
- +46 18 471 72 57
- E-mail:
- tomas.kubart@angstrom.uu.se
- Visiting address:
- Ångströmlaboratoriet, Lägerhyddsvägen 1
75237 UPPSALA - Postal address:
- Box 65
751 03 UPPSALA
- ORCID:
- 0000-0003-2679-2387
Short presentation
My research is focused on synthesis of materials by magnetron sputtering. I am primarily interested in the physics of reactive sputtering, processes taking place at the surfaces and ion surface interaction especially in HiPIMS. Part of my work is also synthesis of various thin films. These are especially oxides for electronics and optics, and sulfides for photovoltaics.

Publications
Selection of publications
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Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Part of Applied Physics Letters, 2018
- DOI for Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
- Download full text (pdf) of Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
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Part of Journal of Applied Physics, 2017
- DOI for Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
- Download full text (pdf) of Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
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Ion induced stress relaxation in dense sputter-deposited DLC thin films
Part of Applied Physics Letters, 2017
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Part of Solar Energy Materials and Solar Cells, p. 137-144, 2016
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Part of Solar Energy Materials and Solar Cells, p. 757-764, 2016
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Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Part of 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015
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Part of Journal of Applied Physics, p. 133302, 2013
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Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Part of Chemistry of Materials, p. 3162-3171, 2013
- DOI for Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
- Download full text (pdf) of Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
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Part of Thin Solid Films, p. 184-191, 2013
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Conformal Ni-silicide formation over three-dimensional device structures
Part of Applied Physics Letters, 2012
Recent publications
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Crystallization kinetics of TiO2 thin films: a comparative study of film deposition conditions
Part of Thin Solid Films, 2026
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On the energy input in the reactive HiPIMS deposition of TiO2
2025
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Part of Journal of Materials Chemistry A, p. 9983-9991, 2025
- DOI for Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
- Download full text (pdf) of Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
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Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
Part of Superconductors Science and Technology, 2025
- DOI for Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
- Download full text (pdf) of Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
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Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
Part of Electrochimica Acta, 2025
- DOI for Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
- Download full text (pdf) of Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
All publications
Articles in journal
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Crystallization kinetics of TiO2 thin films: a comparative study of film deposition conditions
Part of Thin Solid Films, 2026
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Part of Journal of Materials Chemistry A, p. 9983-9991, 2025
- DOI for Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
- Download full text (pdf) of Thermodynamic insights into the Ba–S system for the formation of BaZrS3 perovskites and other Ba sulfides
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Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
Part of Superconductors Science and Technology, 2025
- DOI for Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
- Download full text (pdf) of Ion-assisted sputter-deposition of superconducting NbN thin films on silicon
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Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
Part of Electrochimica Acta, 2025
- DOI for Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
- Download full text (pdf) of Corrosion resistance of coated aluminum bipolar plates for proton exchange membrane fuel cells
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Pulsed plasma vapour deposition of carbon materials: Advantages and challenges
Part of Carbon, 2025
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Part of APPLIED CATALYSIS O: OPEN, 2024
- DOI for Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO2: Insights into amorphous and rutile activity
- Download full text (pdf) of Phase-dependent photo-assisted electrocatalytic conversion of nitrate to ammonia using TiO2: Insights into amorphous and rutile activity
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Self-aligned formation of superconducting sub-5 nm PtSi films
Part of APL Quantum, 2024
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Part of Solar RRL, 2024
- DOI for Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se2 Solar Cell with 13.6% Efficiency Using In2O3:W as a Back Contact Material
- Download full text (pdf) of Bifacial Wide‐Gap (Ag,Cu)(In,Ga)Se2 Solar Cell with 13.6% Efficiency Using In2O3:W as a Back Contact Material
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Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
Part of Advanced Energy Materials, 2024
- DOI for Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
- Download full text (pdf) of Reactive DC Sputtered TiO2 Electron Transport Layers for Cadmium-Free Sb2Se3 Solar Cells
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A solid-state p–n tandem dye-sensitized solar cell
Part of Sustainable Energy & Fuels, p. 1004-1011, 2024
- DOI for A solid-state p–n tandem dye-sensitized solar cell
- Download full text (pdf) of A solid-state p–n tandem dye-sensitized solar cell
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Part of Nature Communications, 2024
- DOI for Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting
- Download full text (pdf) of Embedding biocatalysts in a redox polymer enhances the performance of dye-sensitized photocathodes in bias-free photoelectrochemical water splitting
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Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
Part of Surface & Coatings Technology, 2023
- DOI for Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
- Download full text (pdf) of Photocatalytic activity of TiO2 deposited by reactive HiPIMS with long target-to-substrate distance
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Resilient moth-eye nanoimprinted antireflective and self-cleaning TiO2 sputter-coated PMMA films
Part of Applied Surface Science, 2022
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Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
Part of ACS Applied Energy Materials, p. 6335-6343, 2022
- DOI for Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
- Download full text (pdf) of Synthesis of BaZrS3 Perovskite Thin Films at a Moderate Temperature on Conductive Substrates
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Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
Part of Solar RRL, 2022
- DOI for Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
- Download full text (pdf) of Wide-Gap Chalcopyrite Solar Cells with Indium Oxide-Based Transparent Back Contacts
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Part of ACS Applied Energy Materials, p. 12022-12028, 2022
- DOI for Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
- Download full text (pdf) of Atomic Layer Deposition of SnO2 as an Electron Transport Material for Solid-State P-type Dye-Sensitized Solar Cells
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Superconducting V3Si for quantum circuit applications
Part of Microelectronic Engineering, 2021
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On the description of metal ion return in reactive high power impulse magnetron sputtering
Part of Surface & Coatings Technology, 2021
- DOI for On the description of metal ion return in reactive high power impulse magnetron sputtering
- Download full text (pdf) of On the description of metal ion return in reactive high power impulse magnetron sputtering
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Influence of substrate-induced thermal stress on the superconducting properties of V3Si thin films
Part of Journal of Applied Physics, 2021
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Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
Part of ACS Applied Energy Materials, p. 2762-2770, 2020
- DOI for Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
- Download full text (pdf) of Chalcogenide Perovskite BaZrS3: Thin Film Growth by Sputtering and Rapid Thermal Processing
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A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
Part of Materials, 2020
- DOI for A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
- Download full text (pdf) of A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings
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Part of Coatings, 2020
- DOI for Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
- Download full text (pdf) of Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics
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Part of Coatings, 2020
- DOI for Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
- Download full text (pdf) of Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar plus Ne Plasmas
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Part of Surface & Coatings Technology, 2020
- DOI for Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
- Download full text (pdf) of Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering
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High power impulse magnetron sputtering of diamond-like carbon coatings
Part of Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2020
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Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
Part of Physica Status Solidi (A), 2019
- DOI for Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
- Download full text (pdf) of Antimony-Doped Tin Oxide as Transparent Back Contact in Cu2ZnSnS4 Thin-Film Solar Cells
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Back and front contacts in kesterite solar cells: state-of-the-art and open questions
Part of Journal of Physics, 2019
- DOI for Back and front contacts in kesterite solar cells: state-of-the-art and open questions
- Download full text (pdf) of Back and front contacts in kesterite solar cells: state-of-the-art and open questions
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Metal Filling by High Power Impulse Magnetron Sputtering
Part of Journal of Physics D, 2019
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Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells
Part of The Journal of Physical Chemistry C, p. 26151-26160, 2019
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Solid state p-type dye sensitized NiO-dye-TiO2 core-shell solar cells
Part of Chemical Communications, p. 3739-3742, 2018
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Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
Part of Physical Chemistry, Chemical Physics - PCCP, p. 36-40, 2018
- DOI for Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
- Download full text (pdf) of Ultrafast dye regeneration in a core-shell NiO-dye-TiO2 mesoporous film
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Part of Coatings, 2018
- DOI for Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
- Download full text (pdf) of Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne
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Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering
Part of Surface & Coatings Technology, p. 92-98, 2018
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Part of Journal of Physics D, 2018
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Using hydrogen‐doped In2O3 films as a transparent back contact in (Ag,Cu)(In,Ga)Se2 solar cells
Part of Progress in Photovoltaics, p. 159-170, 2018
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Improving the morphological stability of nickel germanide by tantalum and tungsten additions
Part of Applied Physics Letters, 2018
- DOI for Improving the morphological stability of nickel germanide by tantalum and tungsten additions
- Download full text (pdf) of Improving the morphological stability of nickel germanide by tantalum and tungsten additions
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Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
Part of Applied Physics Letters, 2018
- DOI for Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
- Download full text (pdf) of Highly conductive ultrathin Co films by high-power impulse magnetron sputtering
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Bifacial Cu(In,Ga)Se2 solar cells using hydrogen‐doped In2O3 films as a transparent back contact
Part of Progress in Photovoltaics, p. 846-858, 2018
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Part of Progress in Photovoltaics, p. 13-23, 2018
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Part of Journal of Applied Physics, 2017
- DOI for Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
- Download full text (pdf) of Evolution of sputtering target surface composition in reactive high power impulse magnetron sputtering
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Ion induced stress relaxation in dense sputter-deposited DLC thin films
Part of Applied Physics Letters, 2017
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Formation of nickel germanides from Ni layers with thickness below 10 nm
Part of Journal of Vacuum Science & Technology B, 2017
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Part of Solar Energy Materials and Solar Cells, p. 137-144, 2016
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Part of Solar Energy Materials and Solar Cells, p. 757-764, 2016
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Part of The Journal of Physical Chemistry C, p. 16931-16945, 2016
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Part of Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2016
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E-MRS 2015 Symposium EE: Protective coatings and thin films Preface
Part of Surface & Coatings Technology, p. 1-1, 2016
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Part of Thin Solid Films, p. 77-88, 2015
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Part of Thin Solid Films, p. 8-17, 2015
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Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium
Part of Thin Solid Films, p. 208-214, 2015
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Part of Applied Surface Science, p. 161-169, 2015
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Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering
Part of Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2015
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Part of Applied Surface Science, p. 595-604, 2015
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Reactive sputtering of Cu2ZnSnS4 thin films - Target effects on the deposition process stability
Part of Surface & Coatings Technology, p. 281-285, 2014
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Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed onSi(100)
Part of Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 2014
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Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets
Part of Surface & Coatings Technology, p. 152-157, 2014
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Part of Journal of Applied Physics, 2014
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Mechanisms for compositional variations of coatings sputtered from a WS2 target
Part of Surface & Coatings Technology, p. 186-190, 2014
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Part of Surface & Coatings Technology, p. 74-78, 2014
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Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings
Part of Wear, p. 987-997, 2013
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Influence of Ti addition on the structure and properties of low-friction W–S–C coatings
Part of Surface & Coatings Technology, p. 340-348, 2013
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Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells
Part of Progress in Photovoltaics, p. 10-17, 2013
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Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
Part of Thin Solid Films, p. 22-26, 2013
- DOI for Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
- Download full text (pdf) of Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells
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Part of Journal of Applied Physics, p. 133302, 2013
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Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
Part of Chemistry of Materials, p. 3162-3171, 2013
- DOI for Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
- Download full text (pdf) of Effects of Back Contact Instability on Cu2ZnSnS4 Devices and Processes
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Part of Thin Solid Films, p. 184-191, 2013
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Part of Surface & Coatings Technology, p. 714-719, 2013
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Conformal Ni-silicide formation over three-dimensional device structures
Part of Applied Physics Letters, 2012
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Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
Part of Thin Solid Films, p. 7093-7099, 2012
- DOI for Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
- Download full text (pdf) of Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells
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Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
Part of Surface & Coatings Technology, p. 5055-5059, 2012
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A Detrimental Reaction at the Molybdenum Back Contact in Cu2ZnSn(S,Se)4 Thin-Film Solar Cells
Part of Journal of the American Chemical Society, p. 19330-19333, 2012
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Part of Solar Energy Materials and Solar Cells, p. 110-117, 2012
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Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Part of Electrochemical and solid-state letters, 2011
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Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide
Part of Surface & Coatings Technology, p. 4828-4831, 2011
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Synthesis and characterization of (0001)-textured wurtzite Al(1-x)B(x)N thin films
Part of Surface & Coatings Technology, p. 1033-1036, 2011
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Chemical Insights into the Instability of Cu(2)ZnSnS(4) Films during Annealing
Part of Chemistry of Materials, p. 4625-4633, 2011
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Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides
Part of Thin Solid Films, p. 7779-7784, 2011
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Studies of hysteresis effect in reactive HiPIMS deposition of oxides
Part of Surface & Coatings Technology, 2011
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Part of Journal of Physics D, p. 345501, 2011
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Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness
Part of Electrochemical and solid-state letters, 2011
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Reactive sputtering of SiO2–TiO2 thin film from composite Six/TiO2 targets
Part of Vacuum, p. 317-321, 2010
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Modelling of sputtering yield amplification effect in reactive deposition of oxides
Part of Surface & Coatings Technology, p. 3882-3886, 2010
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ERD analysis and modification of TiO2 thin films with heavy ions
Part of Nuclear Instruments and Methods in Physics Research Section B, p. 1893-1898, 2010
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Modelling of low energy ion sputtering from oxide surfaces
Part of Journal of Physics D, p. 205204, 2010
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Localised modifications of anatase TiO2 thin films by a Focused Ion Beam
Part of Nuclear Instruments and Methods in Physics Research Section B, p. 3142-3146, 2010
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Implantation of anatase thin film with 100 keV 56Fe ions: Damage formation and magnetic behaviour
Part of Nuclear Instruments and Methods in Physics Research Section B, p. 2725-2730, 2009
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Influence of the target composition on reactively sputtered titanium oxide films
Part of Vacuum, p. 1295-1298, 2009
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Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
Part of Thin Solid Films, p. 5548-5552, 2009
- DOI for Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
- Download full text (pdf) of Reactively sputtered ZrN for application as reflecting back contact in Cu(In,Ga)Se-2 solar cells
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A model of DC reactive magnetron sputtering for graded solar thermal absorbers
Part of Journal of Physics, Conference Series, 2008
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Nanoscale colour control: W-O graded coatings deposited by magnetron sputtering
Part of Nanotechnology, p. 395202, 2008
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High rate reactive magnetron sputter deposition of titanium oxide
Part of Applied Physics Letters, p. 221501, 2008
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Experiments and modeling of dual reactive magnetron sputtering using two reactive gases
Part of Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, p. 565-570, 2008
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Direct current magnetron sputtering deposition of nanocomposite alumina – zirconia thin films
Part of Thin Solid Films, p. 8352-8358, 2008
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Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
Part of Plasma Processes and Polymers, 2007
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Part of Appl Phys Lett, 2006
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Dynamic behaviour of the reactive sputtering process
Part of Thin Solid Films, p. 421-424, 2006
Chapters in book
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Reactive high power impulse magnetron sputtering
Part of High Power Impulse Magnetron Sputtering, p. 223-263, Elsevier, 2020
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Part of Copper zinc tin sulfide-based thin film solar cells, p. 203-220, John Wiley & Sons, 2015
Conference papers
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CoCrFeMnNi High-Entropy Alloys for Lithium-Mediated Electrochemical Nitrogen Reduction
2023
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Flipping the physics classroom – First observations
2021
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Organs-on-Chip System with Integrated Transparent Conductive Oxide Electrodes
2018
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Scalability Study of Nickel Germanides
2016
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Magnetron sputtering of InGaZnO and ZnSnO amorphous oxide semiconductors
Part of E-MRS Spring meeting 2015, May 11-15, Lille, France, 2015
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Part of Abstracts, 2015
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Industrial Scale Deposition of Diamond-like Carbon Thin Films using Ne-based HiPIMS Discharge
2015
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Highly textured AlN thin films on Si by reactive High Power Impulse Magnetron Sputtering
Part of 42nd ICMCTF 2015 International Conference on Metallurgical Coatings and Thin Films, 20–24 April, San Diego, USA, 2015
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Metallization of nanostructures by High Power Impulse Magnetron Sputtering
Part of 4 th Magnetron, Ion processing & Arc Technologies European Conference, Paris, 8-11 December 2015, 2015
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2014
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Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium
2014
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Thin AlN films deposited by reactive HiPIMS and pulsed DC sputtering – a comparative study
Part of 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014
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Reactive HiPIMS of Oxides: Hysteresis and Discharge behaviour
Part of Invited talk, 42th International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 -May 2, 2014, 2014
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Measurement of Ionized Metal Flux Fraction in HiPIMS by Retarding Field QCM Analyzer
Part of 41st International Conference on Metallurgical Coatings and Thin Films, San Diego, CA, April 28 - May 2, 2014, 2014
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Dynamics of the sputtering target surface evolution in reactive HiPIMS
Part of Invited talk, 14th International Conference on Plasma Surface Engineering, September 15 - 19, 2014, Garmisch-Partenkirchen, Germany, 2014
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Extreme friction reductions during inital running-in of W-S-C-Ti low-friction coatings
Part of 19th International Conference on Wear of Materials 2013; 14-18 April 2013; Portland, OR, USA, 2013
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Reactive magnetron sputtering: from fundamentals to high deposition rate processes
Part of Proceedings of the Twelfth th International Symposium on Sputtering & Plasma Processes ISSP 2013, p. 5-9, 2013
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Investigation of ionized metal flux fraction in HiPIMS discharge with Ti and Ni target
2013
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Mechanisms responsible for compositional variations of films sputtered from a WS2 target
Part of International Conference on Metallurgical Coatings and Thin films (ICMCTF) 23-27/04 2012, San Diego, abstract number:428, 2012
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p. 9, 2012
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Reactive sputtering of Fe2O3 thin films by high power pulsed plasma systems
2012
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High rate reactive magnetron sputtering of oxides using sputtering yield amplification
2012
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2012
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Reactive magnetron sputtering of precursors for CZTS solar cells
2012
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Modelling of reactive magnetron sputtering: Towards comprehensive model
2012
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Quaternary W-S-C-Ti films for tribological applications
2011
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Sputter Yield Amplification of reactively sputtered TiO2
2011
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Hysteresis effect in reactive high power impulse magnetron sputtering of metal oxides
2011
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Modelling of target effects in reactive HIPIMS
Part of 2nd Internation Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011
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Serial magnetron co-sputtering: Sputtering yield amplification and process modelling
Part of E-MRS 2011 Spring Meeting, 2011
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Synthesis of c-tilted AlN films with a good tilt and thickness uniformity
Part of Proceedings of IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM, p. 1238-1241, 2011
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Implantation and surface modification of TiO2 by a Focused Ion Beam
Part of E-MRS 2011 Spring Meeting, 2011
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Ion irradiation-induced modification of TiO2 thin films
Part of E-MRS 2011 Spring Meeting, 2011
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Part of 2nd International Conference on Fundamentals and Applications of HIPIMS, June 2011, Braunschweig, 2011
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Molecular dynamics simulations of low energy Ar sputtering of TiO2 surfaces
2010
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Studies of hysteresis effect in reactive HiPIMS deposition of oxides
2010
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Studies of TiN films deposited by HIPIMS at different substrate temperatures and substrate bias
2010
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Sputtering Yield Amplification in Reactive Serial Co-Sputtering
2010
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Sputtering yield amplification in reactive sputtering
2010
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Studies and Modelling of Surface Modifications of Different Oxides During Ion Bombardmen
Part of Presented at the 7th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2009), Busan, South Korea, September 20-25, 2009, 2009
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Decorative Oxide Coatings: Colour Control by Compositional Gradient
Part of E-MRS 2009, Spring Meeting in Strasbourgh, France, June 8-12, 2009, 2009
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Part of Presented at the International Symposium on Reactive Sputter Deposition (RSD2009), Manchester, United Kingdom, December 10-11, 2009, 2009
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2009
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Magnetic behaviour of Fe implanted TiO2 thin films
Part of Book of Abstracts, 2008
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Damage formation in TiO2 by heavy ions: consequences for micro- and nano-struring
Part of 7th International Symposium on Swift Heavy Ions in Matter (SHIM2008), 2008
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Experiments and modelling of reactive sputtering using two reactive gases and two targets
2007
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A model of DC reactive magnetron sputtering for graded solar thermal absorbers
2007
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On the high rate reactive sputtering of substoichiometric titanium oxide targets
2007
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State of the art in Reactive Magnetron Sputtering
Part of Invited to The third Mikkeli International Industrial Coating Seminar, MIICS 2006, Mikkeli, Finland, March 16-18, 2006 and Conference Proceedings, 2006
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Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing
2006
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Dynamic Modelling of Reactive Magnetron Sputtering
2006
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Advanced Process Modelling of the Rotating Magnetron
2006
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Modelling of Sputter Erosion Rate Enhancement from Ceramic Targets
Part of Proceedings of Society of Vacuum Coaters, p. 324.328, 2004